Combinatorial RF Biasing for Selectable Spot-Site Isolation

Abstract

An apparatus for combinatorial RF biasing at selectable spots includes one or more RF biasing elements that can be moved to or selectively activated to provide an RF hot spot. The RF hot spot may be selectively provided at various locations of a substrate such as a wafer undergoing combinatorial processing. An RF biasing element may be moved, via a movable arm, to a select location. Alternatively or additionally, more than one RF biasing element may be provided in an array so that an RF biasing element corresponding to the select location is activated. The apparatus may be coupled to or disposed within a substrate support such as a chuck such that the apparatus can operate with a combinatorial processing apparatus.

What is claimed is: 
     
         1 . An apparatus for Radio Frequency (RF) biasing for site isolated processing on a substrate, comprising:
 at least one motor;   a movable arm operatively driven by the at least one motor; and   an RF biasing element mounted on the movable arm;   wherein the at least one motor is capable of driving the arm such that the RF biasing element can be positioned beneath a location of one of a plurality of site isolated regions on the substrate wherein the RF biasing element is operable to generate an RF bias on the substrate at the one of a plurality of site isolated regions.   
     
     
         2 . The apparatus according to  claim 1 , wherein the at least one motor comprises:
 a first motor configured to move the arm along a linear direction, and   a second motor configured to sweep the arm along an angular direction.   
     
     
         3 . The apparatus according to  claim 2 , wherein:
 the at least one motor and arm are coupled to a substrate holder.   
     
     
         4 . The apparatus according to  claim 3 , further comprising:
 an elbow housing the first and second motors.   
     
     
         5 . The apparatus according to  claim 2 , wherein the arm comprises a retractable arm and wherein the first motor telescopes the retractable arm. 
     
     
         6 . The apparatus according to  claim 2 , further comprising:
 a track disposed within or on the arm, wherein the at least one motor comprises:   a first motor configured to move the RF biasing element along the track in a linear direction, and   a second motor configured to sweep the arm along an angular direction.   
     
     
         7 . An apparatus for Radio Frequency (RF) biasing for site isolated processing on a substrate, comprising:
 a plurality of RF biasing elements each configured to generate an RF bias localized to a site isolated region on the substrate; and   a controller coupled to the plurality of RF biasing elements, the controller configured to:
 receive an indication of a selected site isolated region on the substrate at which to generate the RF bias; 
 determine one of the plurality of RF biasing elements that corresponds to the selected site isolated region; and 
 generate a control signal that causes activation of the one of the plurality of RF biasing elements. 
   
     
     
         8 . The apparatus according to  claim 7 , wherein:
 the plurality of RF biasing elements are arranged in an array corresponding to predetermined site isolated region locations.   
     
     
         9 . The apparatus of  claim 7 , wherein the plurality of RF biasing elements are embedded into a substrate support over which the substrate is disposed. 
     
     
         10 . The apparatus of  claim 7 , wherein each of the plurality of RF biasing elements has a size equivalent to a size of the selected site on the substrate. 
     
     
         11 . The apparatus of  claim 7 , wherein each of the plurality of RF biasing elements is stationary. 
     
     
         12 . An apparatus for combinatorial Radio Frequency (RF) biasing for site isolated processing on a substrate, comprising:
 at least one RF biasing element configured to generate an RF bias at a site isolated region on the substrate; and   a controller coupled to the at least one RF biasing element, the controller configured to:   receive an indication of a selected site isolated region on the substrate at which to generate the RF bias;   determine a position that corresponds to the selected site isolated region; and   generate a control signal based on the determined position, the control signal causing the at least one RF biasing element to generate the RF bias at the selected site isolated region.   
     
     
         13 . The apparatus according to  claim 12 , comprising:
 a movable arm operatively driven by at least one motor and having the at least one RF biasing element mounted thereto; wherein:   the control signal causes the movable arm to move the at least one RF biasing element to the selected site isolated region.   
     
     
         14 . The apparatus according to  claim 13 , wherein the at least one motor comprises:
 a first motor configured to telescope the arm along a linear direction, and   a second motor configured to sweep the arm along an angular direction.   
     
     
         15 . The apparatus according to  claim 14 , wherein:
 the at least one motor and arm are coupled to a substrate support.   
     
     
         16 . The apparatus according to  claim 15 , further comprising:
 an elbow housing the first and second motors.   
     
     
         17 . The apparatus according to  claim 12 , wherein the at least one RF biasing element is embedded within a substrate support disposed under the substrate.