Heat-conducting element, assembly and use of the same

Abstract

The invention relates to a heat-conducting element ( 10 ) for arrangement between movable components (B 1, B 2 ) in a vacuum, comprising rolling elements ( 11 ), which are guided between two running surfaces ( 12, 13 ) that can be moved linearly relative to each other, and further comprising at least one supporting element ( 14 ), which is mounted so as to spring back elastically against one of the running surfaces ( 12 ) and which contacts said running surface ( 12 ) in such a manner that a thermal bridge exists between said supporting element ( 14 ) and the running surface ( 12 ). The invention further relates to an assembly ( 30 ) made of two components (B 1, B 2 ) which can be moved relative to each other, comprising at least one linear bearing ( 20 ) accommodated between said components (B 1, B 2 ), and at least one heat-conducting element ( 10 ) according to the invention, which is arranged between the components (B 1, B 2 ) in an elastically preloaded manner.

1 .- 10 . (canceled) 
     
     
         11 . A heat-conducting element for arrangement between movable components in a vacuum, comprising rolling elements which are guided between two running surfaces that can be moved linearly relative to each other, and further comprising at least one supporting element which is mounted elastically springing back against one of the running surfaces and which is in contact with said running surface such that a thermal bridge exists between said supporting element and the running surface, wherein the rolling elements are arranged at a distance from each other which is less than half of their respective diameter. 
     
     
         12 . A heat-conducting element according to claim  1 , in which the rolling elements have an elongated cylindrical shape. 
     
     
         13 . A heat-conducting element according to claim  1 , in which the supporting element comprises at least one projecting part and one of the running surfaces comprises at least one opening allocated to said projecting part and/or vice versa, and the respective projecting part engages with or penetrates said opening. 
     
     
         14 . A heat-conducting element according to claim  1 , in which the supporting element at least partly encompasses the running surface and/or the running surface at least partly encompasses the supporting element. 
     
     
         15 . A heat-conducting element according to claim  1 , in which the supporting element consists of a metallic material. 
     
     
         16 . A heat-conducting element according to claim  1 , in which at least one spring element is provided between the supporting element and the running surface. 
     
     
         17 . An assembly comprising two components which are movable relative to each other in a vacuum, having at least one linear bearing retained between said components and at least one heat-conducting element according to claim  1 , arranged elastically pre-loaded between the components. 
     
     
         18 . An assembly according to claim  7 , having a drive for moving at least one of the components relative to the respective other component, said drive being arranged between said two components. 
     
     
         19 . An assembly according to claim  8 , in which the drive is arranged closer with respect to space to the at least one heat-conducting element than to the at least one linear bearing. 
     
     
         20 . A manufacturing device for wafers comprising an assembly according to claim  7 .