US2013147880A1PendingUtilityA1

Piezoelectric material and piezoelectric element

Assignee: SEIKO EPSON CORPPriority: Apr 1, 2008Filed: Feb 8, 2013Published: Jun 13, 2013
Est. expiryApr 1, 2028(~1.7 yrs left)· nominal 20-yr term from priority
H10N 30/8561B41J 2/14233B41J 2/161B41J 2/1645B41J 2/045H10N 30/078H01L 41/18H10N 30/708
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Claims

Abstract

A piezoelectric element includes a first electrode, a piezoelectric film disposed on the first electrode, and a second electrode disposed on the piezoelectric film. The piezoelectric film is composed of piezoelectric material that is lead free and formed by mixing 100 (1-x) % of material A having a spontaneous polarization of 0.5 C/m2 or greater at 25° C. and 100 x % of material B having piezoelectric characteristics and a dielectric constant of 1000 or greater at 25° C., wherein (1-x) Tc (A)+x Tc (B) >300° C., where Tc (A) is the Curie temperature of the material A and Tc (B) is the Curie temperature of the material B.

Claims

exact text as granted — not AI-modified
1 - 9 . (canceled) 
     
     
         10 . A piezoelectric element comprising:
 a first electrode;   a piezoelectric film disposed on the first electrode; and   a second electrode disposed on the piezoelectric film,   wherein the piezoelectric film is composed of piezoelectric material that is formed by mixing 100 (1-x) % material A having a spontaneous polarization of 0.5 C/m 2  or greater at 25° C. and 100 x % material B having piezoelectric characteristics and a dielectric constant of  1000  or greater at 25° C.,   wherein (1-x) Tc (A)+x Tc (B)≧300° C., where Tc (A) is the Curie temperature of the material A and Tc (B) is the Curie temperature of the material B, and;   wherein the piezoelectric constant d 33  is 46.5 (pm/V) or higher.   
     
     
         11 . The piezoelectric element according to  claim 10 , wherein each of the first electrode and the second electrode is formed from one of metals, one of conductive oxides, or a laminate of layers of plural ones of the metals or the conductive oxides. 
     
     
         12 . The piezoelectric element according to  claim 10 , wherein one of the first electrode and the second electrode is formed from any one of or a laminate of layers of selected ones of Pt, Ir, Au, Ti, Zr, Fe, Mn, Ni, Co, IrO 2 , Nb:SrTiO 3 , La:SrTiO 3 , SrRuO 3 , LaNiO 3 , (La, Sr)FeO 3 , and (La, Sr)CoO 3 . 
     
     
         13 . The piezoelectric element according to  claim 10 , wherein the first electrode, the piezoelectric material film and the second electrode are formed on a base substrate. 
     
     
         14 . The piezoelectric element according to  claim 13 , wherein the base substrate is formed from one of semiconductor material, metal, ceramic and glass. 
     
     
         15 . The piezoelectric element according to  claim 13 , wherein the base substrate is made of a material having a melting point or a glass transition point that is 650° C. or higher. 
     
     
         16 . A liquid ejection head comprising the piezoelectric element as claimed in  claim 10 . 
     
     
         17 . A liquid ejecting apparatus comprising the liquid ejection head as claimed in  claim 16 .

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