Liquid ejecting head, liquid ejecting apparatus, and actuator device

Abstract

A liquid ejecting head including a pressure-generating chamber which communicates with a nozzle opening, and a piezoelectric element including a first electrode, a piezoelectric layer formed above the first electrode and having a perovskite structure represented by the general formula ABO 3 , and a second electrode formed above the piezoelectric layer, wherein the piezoelectric layer, lead, zirconium, and titanium are present at A sites of the perovskite structure, and lead, zirconium, and titanium are present at B sites of the perovskite structure.

What is claimed is: 
     
         1 . A piezoelectric element comprising:
 a first electrode;   a piezoelectric layer formed above the first electrode and having a perovskite structure represented by the general formula ABO 3 ; and   a second electrode formed above the piezoelectric layer;   wherein lead, zirconium, and titanium are present at A sites in the piezoelectric layer, and lead, zirconium, and titanium are present at B sites in the piezoelectric layer.   
     
     
         2 . The piezoelectric element according to  claim 1 , wherein the amount of lead present at the A sites in the piezoelectric layer is larger than the amount of zirconium present at the A sites and larger than the amount of titanium present at the A sites. 
     
     
         3 . The piezoelectric element according to  claim 1 , wherein the amount of lead present at the B sites in the piezoelectric layer is smaller than the amount of zirconium present at the B sites and smaller than the amount of titanium present at the B sites. 
     
     
         4 . The piezoelectric element according to  claim 1 , wherein the piezoelectric layer is oriented in a (100) plane and has a monoclinic structure. 
     
     
         5 . The piezoelectric element according to  claim 1 , wherein the amount of titanium present at the A sites in the piezoelectric layer is larger than the amount of zirconium present at the A sites in the piezoelectric layer. 
     
     
         6 . The piezoelectric element according to  claim 1 , wherein the amount of a transition metal present at the A sites in the piezoelectric layer is 4% or more of the whole of the A sites. 
     
     
         7 . The piezoelectric element according to  claim 1 , wherein the amount of lead present at the B sites in the piezoelectric layer is 2.5% to 15%.