Temperature adjusting device, and imprinting device using same

Abstract

A temperature adjusting device that can heat and cool an object like a mold or a molding target uniformly and quickly, and an imprinting device using the same are provided. The temperature adjusting device is for adjusting a temperature of the object like a mold 100 or a molding target 200 , and includes fluid supplying means 1 for supplying a fluid at a predetermined temperature from a plurality of supply openings 11 , holding means 2 including a holding face 21 that holds the object, and a fluid receiving face 22 that receives the fluid supplied from the supply openings 11 , a temperature adjusting housing 3 that constructs, together with the holding means 2 , a temperature adjusting chamber 31 which retains thereinside the supply openings 11 , and a discharging channel 4 that discharges the fluid in the temperature adjusting chamber 31.

1 . A temperature adjusting device for adjusting a temperature of an object, the device comprising:
 fluid supplying means for supplying a fluid at a predetermined temperature from a plurality of supply openings;   holding means, the holding means comprising:   a holding face that holds the object; and   a fluid receiving face that receives the fluid supplied from the supply openings;   a temperature adjusting housing that constructs, together with the holding means, a temperature adjusting chamber which retains thereinside the supply openings; and   a discharging channel that discharges the fluid in the temperature adjusting chamber.   
     
     
         2 . The temperature adjusting device according to  claim 1 , wherein the fluid receiving face comprises a plurality of concavities or convexities arranged in accordance with respective positions of the supply openings. 
     
     
         3 . The temperature adjusting device according to  claim 1 , wherein the fluid supplying means comprises:
 a first heating tank and a second heating tank that heat the fluid to a predetermined temperature;   a supply channel that selectively connects the first heating tank or the second heating tank with the supply openings; and   the discharging channel that selectively connects the temperature adjusting chamber with the first heating tank or the second heating tank.   
     
     
         4 . The temperature adjusting device according to  claim 1 , wherein the fluid supplying means comprises:
 a heating tank that heats the fluid to a predetermined temperature;   a supply channel that connects the heating tank with the supply openings;   supply channel opening/closing means for opening and closing the supply channel;   a collecting tank connected to the discharging channel;   a circulation flow channel that connects the collecting tank with the heating tank; and   circulation flow channel opening/closing means for opening and closing the circulation flow channel.   
     
     
         5 . The temperature adjusting device according to  claim 1 , wherein the fluid supplying means comprises:
 a cooling tank that reserves a cooling fluid;   a cooling fluid supply channel that connects the cooling tank with the supply openings; and   a pump for letting the fluid in the cooling tank to flow from the supply openings.   
     
     
         6 . The temperature adjusting device according to  claim 2 , wherein respective shapes of the concavities or the convexities are a square pyramid. 
     
     
         7 . An imprinting device for transferring a molding pattern of a mold on a molding target, the imprinting device comprising:
 fluid supplying means for supplying a fluid at a predetermined temperature from a plurality of supply openings;   holding means, the holding means comprising:   a holding face that holds the mold or the molding target; and   a fluid receiving face that receives the fluid supplied from the supply openings;   a temperature adjusting housing that constructs, together with the holding means, a temperature adjusting chamber which retains thereinside the supply openings; and   a discharging channel that discharges the fluid in the temperature adjusting chamber.   
     
     
         8 . The temperature adjusting device according to  claim 2 , wherein the fluid supplying means comprises:
 a cooling tank that reserves a cooling fluid;   a cooling fluid supply channel that connects the cooling tank with the supply openings; and   a pump for letting the fluid in the cooling tank to flow from the supply openings.   
     
     
         9 . The temperature adjusting device according to  claim 3 , wherein the fluid supplying means comprises:
 a cooling tank that reserves a cooling fluid;   a cooling fluid supply channel that connects the cooling tank with the supply openings; and   a pump for letting the fluid in the cooling tank to flow from the supply openings.   
     
     
         10 . The temperature adjusting device according to  claim 4 , wherein the fluid supplying means comprises:
 a cooling tank that reserves a cooling fluid;   a cooling fluid supply channel that connects the cooling tank with the supply openings; and   a pump for letting the fluid in the cooling tank to flow from the supply openings.