Vertical Heat Treating Furnace

Abstract

The vertical heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P 1 ) in the gas circulation chamber outside the inner body greater than the second pressure (P 2 ) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.

What is claimed is: 
     
         1 . A vertical heat treating furnace comprising:
 an outer body having an exterior wall and an interior wall, thereby forming a first receiving space, and having a first side and a second side corresponding to said first side, said first side being provided with an opening of said first receiving space, said second side is a sealed side;   an inner body being spaced and fixed in said first receiving space of said outer body, having an outer wall and an inner wall, thereby forming a second receiving space, having a third side and a fourth side corresponding to said third side, a part of said third side being connected with said first side by a lower sealed side thereby forming an opening of said second receiving space, said fourth side is a sealed side, wherein a gas circulation chamber being formed between said outer wall of said inner body and said interior wall of said outer body, a reaction chamber being formed inside said inner wall of said inner body; and   a gate door having an outer surface and an inner surface, being contacted with said opening of said second receiving space of said third side by said inner surface, thereby either of said gas circulation chamber and said reaction chamber being an independent chamber.   
     
     
         2 . The vertical heat treating furnace of  claim 1 , wherein said outer body is made of steel or stainless steel such as SUS304 and SUS316. 
     
     
         3 . The vertical heat treating furnace of  claim 1 , wherein said inner body is made of quartz or silicon dioxide (SiO 2 ). 
     
     
         4 . The vertical heat treating furnace of  claim 1 , wherein said gas circulation chamber is provided with at least one first sensor. 
     
     
         5 . The vertical heat treating furnace of  claim 1 , wherein said reaction chamber is provided with at least one second sensor. 
     
     
         6 . The vertical heat treating furnace of  claim 4 , wherein said first sensor is a pressure gauge. 
     
     
         7 . The vertical heat treating furnace of  claim 5 , wherein said second sensor is a pressure gauge. 
     
     
         8 . The vertical heat treating furnace of  claim 4 , wherein said first sensor is a gas density analyzer. 
     
     
         9 . The vertical heat treating furnace of  claim 5 , wherein said second sensor is a gas density analyzer. 
     
     
         10 . The vertical heat treating furnace of  claim 1 , further comprising a heating mechanism being fixed and contacted with said outer wall of said inner body. 
     
     
         11 . The vertical heat treating furnace of  claim 10 , wherein said heating mechanism is a carbon heater or a halogen lamp heater. 
     
     
         12 . The vertical heat treating furnace of  claim 1 , further comprising a gas supplying mechanism constituted by a plurality of gas pipes, said gas pipes passing through said outer surface and said inner surface of said gate door, thereby introducing gases into said gas circulation chamber and said reaction chamber via said opening of said second receiving space and said lower sealed side. 
     
     
         13 . The vertical heat treating furnace of  claim 1 , further comprising a gas supplying mechanism which is constituted by a plurality of gas pipes, said gas pipes passing through said outer surface and said inner surface of said gate door, thereby introducing gases into said gas circulation chamber and said reaction chamber via said opening of said second receiving space and said lower sealed side 
     
     
         14 . The vertical heat treating furnace of  claim 13 , further comprising a controller being set outside said outer body for controlling a gas supplying mechanism, thereby controlling the supply amount of a first gas and a second gas into said gas circulation chamber and said reaction chamber, thereby forming a first pressure (P 1 ) in said gas circulation chamber, and forming a second (P 2 ) in said reaction chamber. 
     
     
         15 . The vertical heat treating furnace of  claim 14 , wherein said first pressure (P 1 ) and said second pressure (P 2 ) is greater than 1 atm. 
     
     
         16 . A vertical heat treating furnace comprising:
 an outer body having an exterior wall and an interior wall, thereby forming a first receiving space, and having a first side and a second side corresponding to said first side, said first side being provided with an opening of said first receiving space, said second side is a sealed side;   an inner body being spaced and fixed in said first receiving space of said outer body, having an outer wall and an inner wall, thereby forming a second receiving space, having a third side and a fourth side corresponding to said third side, a part of said third side being connected with said first side by a lower sealed side thereby forming an opening of said second receiving space, said fourth side is a sealed side, wherein a gas circulation chamber being formed between said outer wall of said inner body and said interior wall of said outer body, a reaction chamber being formed inside said inner wall of said inner body;   a heating mechanism being fixed and contacted with said outer wall of said inner body;   a gate door having an outer surface and an inner surface, being contacted with said opening of said second receiving space of said third side by said inner surface, thereby either of said gas circulation chamber and said reaction chamber being an independent chamber;   a gas supplying mechanism constituted by a plurality of gas pipes, said gas pipes passing through said outer surface and said inner surface of said gate door, thereby introducing gases into said gas circulation chamber and said reaction chamber via said opening of said second receiving space and said lower sealed side; and   a controller set outside said outer body for controlling said gas supplying mechanism, thereby controlling the supply amount of a first gas and a second gas into said gas circulation chamber and said reaction chamber, thereby forming a first pressure (P 1 ) in said gas circulation chamber, and forming a second (P 2 ) in said reaction chamber.   
     
     
         17 . The vertical heat treating furnace of  claim 16 , wherein said gas circulation chamber is provided with at least one first sensor and each of said first sensor is connected with the controller. 
     
     
         18 . The vertical heat treating furnace of  claim 16 , wherein said reaction chamber is provided with at least one second sensor and each of said second sensor is connected with the controller. 
     
     
         19 . The vertical heat treating furnace of  claim 16 , wherein said first pressure (P 1 ) and said second pressure (P 2 ) is greater than 1 atm. 
     
     
         20 . The vertical heat treating furnace of  claim 16 , wherein said outer body is made of steel or stainless steel such as SUS304 and SUS316. 
     
     
         21 . The vertical heat treating furnace of  claim 16 , wherein said inner body is made of quartz or silicon dioxide (SiO 2 ).