US2013118589A1PendingUtilityA1

Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel

Assignee: MKS INSTR INCPriority: Nov 15, 2011Filed: Nov 8, 2012Published: May 16, 2013
Est. expiryNov 15, 2031(~5.3 yrs left)· nominal 20-yr term from priority
H01J 2237/006C23C 16/50C23C 16/45591H01J 37/32009Y10T137/0318Y10T137/8376H01J 37/32449F17D 1/04H05H 1/12H01J 37/321H01J 37/32807Y02E30/10C23C 16/45587H01J 37/32357H01J 37/32513G21B 1/17
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Claims

Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

Claims

exact text as granted — not AI-modified
1 . An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:
 a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein:
 the first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, the first inner cross-sectional area and the second inner-cross-sectional area being different, and 
 the second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, the third inner cross-sectional area and the fourth inner-cross-sectional area being different; and 
   a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.   
     
     
         2 . The assembly of  claim 1 , wherein the first inner cross-sectional area and the third inner cross-sectional area are the same. 
     
     
         3 . The assembly of  claim 1 , wherein the first side member and the second side member have a complementary shape. 
     
     
         4 . The assembly of  claim 3 , wherein the first side member and the second side member are parallel. 
     
     
         5 . The assembly of  claim 1 , wherein an inner cross-sectional area along the first side member and an inner cross-sectional area along the second side member are connected in a smooth contour for continuous fluid flow. 
     
     
         6 . The assembly of  claim 1 , wherein first inner cross-sectional area and the third inner cross-sectional area are in the range of 2 to 50 cm 2 . 
     
     
         7 . The assembly of  claim 1 , wherein the second inner cross-sectional area and the fourth inner cross-sectional area are in the range of 3 to 80 cm 2 . 
     
     
         8 . The assembly of  claim 1 , wherein the first inner cross-sectional area and the third inner cross-sectional area are downstream of the second inner cross-sectional area and the fourth inner cross-sectional area, respectively, along the toroidal plasma chamber. 
     
     
         9 . The assembly of  claim 1 , wherein both the first side member and the second side member are connected to the injection member and the output member with connectors that create a vacuum seal to prevent leakage of gas and plasma and an electric break. 
     
     
         10 . The assembly of  claim 9 , wherein the connectors are fluid cooled. 
     
     
         11 . The assembly of  claim 1 , wherein the first side member and the second side member are removable. 
     
     
         12 . An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:
 a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein:
 the first side member has an inner cross-sectional area that is different from the inner cross-sectional area of the second side member; and 
   a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.   
     
     
         13 . A kit for constructing a toroidal plasma chamber, the kit comprising:
 an injection member capable of receiving and delivering a gas;   an output member capable of allowing disassociated gas to flow out of the toroidal plasma chamber;   a first side member capable of allowing gas and plasma to flow through, the first side member having a first inner cross-sectional area in at least a first portion, the first inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member;   a second side member capable of allowing gas and plasma to flow through, the second side member having a second inner cross-sectional area in at least a second portion, the second inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member; and   water cooled connectors, the water cooled connectors creating a vacuum seal to prevent leakage of gas and plasma, and an electric break.   
     
     
         14 . The kit of  claim 13 , wherein the first side member and the second side member are removable. 
     
     
         15 . A method for adjusting gas flow patterns and gas-plasma interactions, the method comprising:
 inserting a first side member into a toroidal plasma chamber having a first inner cross-sectional area based on a first predetermined size of a plasma;   inserting a second side member into a toroidal plasma chamber having a second inner cross-sectional area based on a second predetermined size of a plasma;   injecting a gas into the toroidal plasma chamber through an injection member;   causing a flow of gas within the toroidal plasma chamber; and   generating plasma within the toroidal plasma chamber such that plasma flows through an opening of the first side member and through an opening of the second side member.   
     
     
         16 . The method of  claim 15 , wherein the first and the second predetermined plasma size substantially matches the size of plasma that is flowing through the toroidal plasma chamber. 
     
     
         17 . A method for replacing a side member of a toroidal plasma chamber, the method comprising:
 removing a first connector connecting a first side member and an injection member;   removing a second connector connecting the first side member and an output member;   removing the first side member from the toroidal plasma chamber;   installing a second side member into the toroidal plasma chamber, the second side member being a replacement of the first side member;   installing the first connector to connect the second side member and the injection member; and   installing the second connector to connect the second side member and the output member.

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