Semiconductor device and method of manufacturing same

Abstract

To provide a technique capable of improving reliability of a semiconductor device having a nonvolatile memory cell by suppressing the reduction of the drive force. A memory cell is configured by a selection pMIS having a selection gate electrode including a conductive film exhibiting a p-type conductivity and a memory pMIS having a memory gate electrode including a conductive film exhibiting a p-type conductivity, and at the time of write, hot electrons are injected into a charge storage layer from the side of a semiconductor substrate 1 and at the time of erase, hot holes are injected into the charge storage layer from the memory gate electrode.

1 - 56 . (canceled) 
     
     
         57 . A semiconductor device having a memory cell,
 wherein the memory cell has:   a first well formed in a semiconductor substrate and exhibiting an n-type conductivity;   a first gate insulating film formed over the first well;   a first gate electrode formed over the first gate insulating film and including a first conductive film exhibiting a p-type conductivity;   a second gate electrode formed over one side surface of the first gate electrode, the second gate electrode including a second conductive film exhibiting a p-type conductivity;   a second gate insulating film formed between the first gate electrode and the second gate electrode and formed between the second gate electrode and the semiconductor substrate, the second gate insulating film having a charge storage layer; and   a first source region exhibiting a p-type conductivity and a first drain region exhibiting a p-type conductivity, both formed in the first well,   wherein data is written to the memory cell by injecting electrons into the charge storage layer from the semiconductor substrate, and   wherein the data is erased by injecting holes into the charge storage layer from the memory gate electrode.   
     
     
         58 . The semiconductor device according to  claim 57 ,
 wherein the second gate electrode is formed into the form of a sidewall.   
     
     
         59 . The semiconductor device according to  claim 57 ,
 wherein the second gate insulating film is formed by a laminated film including a lower layer insulating film, the charge storage layer formed over the lower layer insulating film, and an upper layer insulating film formed over the charge storage layer.   
     
     
         60 . The semiconductor device according to  claim 59 ,
 wherein the charge storage layer includes silicon nitride.   
     
     
         61 . The semiconductor device according to  claim 57 ,
 wherein on the periphery of the memory cell, a p-channel type MISFET and an n-channel type MISFET are formed,   wherein the p-channel type MISFET has:   a second well exhibiting an n-type conductivity formed in the semiconductor substrate;   a third gate insulating film formed over the second well;   a third gate electrode including a conductive film exhibiting a p-type conductivity; and   a second source region exhibiting a p-type conductivity and a second drain region exhibiting a p-type conductivity,   wherein the n-channel type MISFET has:   a third well exhibiting a p-type conductivity formed in the semiconductor substrate;   a fourth gate insulating film formed over the third well;   a fourth gate electrode including a conductive film exhibiting an n-type conductivity; and   a third source region exhibiting an n-type conductivity and a third drain region exhibiting an n-type conductivity,   wherein over the memory cell and the p-channel type MISFET, a first insulating film having compression stress is formed, and   wherein over the n-channel type MISFET, a second insulating film having tensile stress is formed.   
     
     
         62 . The semiconductor device according to  claim 61 ,
 wherein the first insulating film or the second insulating film is an insulting film used as an etching stopper when forming a self-alignment contact.   
     
     
         63 . The semiconductor device according to  claim 61 ,
 wherein the first insulating film or the second insulating film includes silicon nitride.   
     
     
         64 . The semiconductor device according to  claim 61 ,
 wherein over the first insulating film and the second insulating film, a third insulating film is formed,   wherein a first plug that reaches the first source region or the first drain region of the memory cell is formed in a laminated film including the first insulating film and the third insulating film,   wherein a second plug that reaches the second source region or the second drain region of the p-channel type MISFET is formed in a laminated film including the first insulating film and the third insulating film, and   wherein a plurality of third plugs that reach the third source region or the third drain region of the n-channel type MISFET is formed in a laminated film including the second insulating film and the third insulating film.   
     
     
         65 . The semiconductor device according to  claim 57 ,
 wherein on the periphery of the memory cell, an re-channel type MISFET is formed,   wherein the n-channel type MISFET has:   a third well exhibiting a p-type conductivity formed in the semiconductor substrate;   a fourth gate insulating film formed over the third well;   a fourth gate electrode including a conductive film exhibiting an n-type conductivity; and   a third source region exhibiting an n-type conductivity and a third drain region exhibiting an n-type conductivity, and   wherein over the memory cell and the n-channel type MISFET, a fourth insulating film having tensile stress is formed.   
     
     
         66 . The semiconductor device according to  claim 65 ,
 wherein the fourth insulating film is an insulating film used as an etching stopper when forming a self-alignment contact.   
     
     
         67 . The semiconductor device according to  claim 65 ,
 wherein the fourth insulating film includes silicon nitride.   
     
     
         68 . The semiconductor device according to  claim 65 ,
 wherein over the fourth insulating film, a third insulating film is formed,   wherein a first plug that reaches the first source region of the memory cell is formed in a laminated film including the fourth insulating film and the third insulating film, and   wherein a third plug that reaches the third source region or the third drain region of the n-channel type MISFET is formed in a laminated film including the fourth insulating film and the third insulating film.   
     
     
         69 . The semiconductor device according to  claim 57 ,
 wherein the injecting holes into the charge storage layer is performed by a Fowler-Nordheim tunnel current.   
     
     
         70 . The semiconductor device according to  claim 57 ,
 wherein the electrons injected to the memory cell from the semiconductor substrate are hot electrons.