US2013112337A1PendingUtilityA1

Shower plate, manufacturing method of the shower plate, and plasma processing apparatus using the shower plate

Assignee: TOKYO ELECTRON LTDPriority: Jun 13, 2006Filed: Dec 28, 2012Published: May 9, 2013

Est. expiryJun 13, 2026(expired)· nominal 20-yr term from priority

Inventors:Masahiro Okesaku Tetsuya Goto Tadahiro Ohmi Kiyotaka Ishibashi

C23C 16/45565C23C 16/511B05B 1/18H01J 37/32449C23C 16/45568H01J 37/3244

PatentIndex Score

Cited by

References

Claims

Abstract

A manufacturing method of a shower plate includes inserting a green body, a degreasing body, a temporary sintered body or a sintered body of a ceramic member, which has a plurality of gas discharge holes or gas flow holes, into a longitudinal hole of a green body, a degreasing body or a temporary sintered body of the shower plate, which has been formed by power ingredients; and sintering them simultaneously.

Claims

exact text as granted — not AI-modified

What is claimed is: 
     
         1 . A manufacturing method of a shower plate comprising:
 inserting a green body, a degreasing body, a temporary sintered body or a sintered body of a ceramic member, which has a plurality of gas discharge holes or gas flow holes, into a longitudinal hole of a green body, a degreasing body or a temporary sintered body of the shower plate, which has been formed by power ingredients; and   sintering them simultaneously.   
     
     
         2 . A shower plate manufactured by the manufacturing method of  claim 1 . 
     
     
         3 . A plasma processing apparatus using the shower plate of  claim 2 .

Join the waitlist — get patent alerts

Track US2013112337A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.