Temperature control device

Abstract

A temperature control device includes: a top plate; a heat exchanger plate; a thermoelectric module including a temperature-control-side electrode disposed near the top plate, a heat-exchanger-side electrode disposed near the heat exchanger plate and a thermoelectric element of which one side is connected with the temperature-control-side electrode and the other side is connected with the heat-exchanger-side electrode; and a polyimide film provided on the thermoelectric module near the top plate. The thermoelectric module is spaced apart from and surrounded by a seal wall having a ceramic outer circumference and disposed between the polyimide film and the heat exchanger plate. An adhesion sheet or an adhesive is interposed between the seal wall and the polyimide film.

What is claimed is: 
     
         1 . A temperature control device, comprising:
 a stage plate on which an object of which temperature is to be controlled is placed;   a heat exchanger plate;   a thermoelectric module comprising a temperature-control-side electrode disposed near the stage plate, a heat-exchanger-side electrode disposed near the heat exchanger plate and a thermoelectric element, the thermoelectric element comprising one side connected with the temperature-control-side electrode and the other side connected with the heat-exchanger-side electrode; and   a protection member provided at least on a side of the thermoelectric module near the stage plate, wherein   the thermoelectric module is spaced apart from and surrounded by a seal wall having a ceramic outer circumference and disposed between the protection member and the heat exchanger plate, and   an adhesion sheet or an adhesive is interposed between the seal wall and the protection member.   
     
     
         2 . The temperature control device according to  claim 1 , wherein
 the seal wall is made of a ceramic of aluminum oxide, aluminum nitride or alumited aluminum.   
     
     
         3 . The temperature control device according to  claim 1 , wherein
 the protection member is a polyimide   
     
     
         4 . The temperature control device according to  claim 1 , wherein
 the protection member is a ceramic plate.   
     
     
         5 . The temperature control device according to  claim 1 , further comprising:
 a thermoelectric module plate provided between the stage plate and the heat exchanger plate, the thermoelectric module plate being provided thereon with the thermoelectric module; and   a bush or a boss provided at a position corresponding to a through hole penetrating through the protection member, the bush or the boss being bonded with the protection member.