Holder for semiconductor wafers and flat substrates

Abstract

A holder for a flat substrate, such as for example a semiconductor wafer or a glass slide, has a fixture with a sample insertion groove for holding the flat substrate, or multiple sample insertion grooves for holding multiple flat substrates. The fixture also has a channel milled perpendicular to the sample insertion groove. The channel may be machined such that two portions of the channel open to opposite sides of the fixture. Positioned in the channel of the fixture is a cantilever spring for securing the flat substrate in the sample insertion groove. The channel may contain a single cantilever spring that extends an entire length of the channel, or multiple cantilever springs. The fixture may include a post, dove tail, screw, or clamp for mounting the holder on a stage inside a vacuum chamber of an instrument.

1 . A holder for a flat substrate, the holder comprising:
 a fixture composed of a nonmagnetic material, wherein the fixture has a sample insertion groove and a channel milled perpendicular to the sample insertion groove;   a cantilever spring for securing the flat substrate in the sample insertion groove;   wherein the cantilever spring is positioned in the channel.   
     
     
         2 . The holder of  claim 1  wherein the flat substrate is a semiconductor wafer. 
     
     
         3 . The holder of  claim 1  wherein the cantilever spring is held in place only by its own compression against opposing surfaces of the channel. 
     
     
         4 . The holder of  claim 1  wherein the fixture is a milled solid piece of metal. 
     
     
         5 . The holder of  claim 1  wherein the fixture is composed of two milled solid pieces of metal held together with screws. 
     
     
         6 . The holder of  claim 1  wherein the cantilever spring is composed of an EMI shielding gasket material. 
     
     
         7 . The holder of  claim 1  wherein the cantilever spring is composed of beryllium copper. 
     
     
         8 . The holder of  claim 1  wherein the nonmagnetic material is brass or aluminum. 
     
     
         9 . The holder of  claim 1  wherein the fixture has a post for mounting the holder on a stage inside a vacuum chamber of an instrument. 
     
     
         10 . The holder of  claim 1  wherein the fixture has multiple cantilever springs positioned in the channel. 
     
     
         11 . The holder of  claim 1  wherein the fixture has multiple sample insertion grooves for holding multiple flat substrates. 
     
     
         12 . The holder of  claim 1  wherein the flat substrate is a glass slide. 
     
     
         13 . The holder of  claim 1  wherein the cantilever spring is held in place by screws, glue, or a clamp. 
     
     
         14 . The holder of  claim 1  wherein the nonmagnetic material is titanium, stainless steel, brass or copper. 
     
     
         15 . The holder of  claim 1  wherein the fixture has a dove tail, screw, or clamp for mounting the holder on a stage inside a vacuum chamber of an instrument. 
     
     
         16 . The holder of  claim 1  wherein the cantilever spring extends an entire length of the channel. 
     
     
         17 . The holder of  claim 1  wherein the channel has two portions open to opposite sides of the fixture. 
     
     
         18 . The holder of  claim 1  comprising a second fixture that has a second sample insertion groove and a second channel milled perpendicular to the second sample insertion groove, and a movable post positioned between the fixture and second fixture for cleaving the flat substrate.