Advanced Mixing System for Integrated Tool Having Site-Isolated Reactors

Abstract

An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.

1 . A substrate processing system comprising:
 a fluid delivery system;   a plurality of site-isolated reactors coupled to the fluid delivery system, the plurality of site-isolated reactors configured to receive chemicals from the fluid delivery system, the plurality of site-isolated reactors configured for independent control of chemical delivery and processing parameters used to effect site-isolated processing of a wafer; and   a full wafer reactor coupled to the fluid delivery system, the full wafer reactor effecting full-wafer processing of the wafer, the full-wafer processing integrated with the site-isolated processing.   
     
     
         2 . The system of  claim 1 , wherein the fluid delivery system includes at least one first manifold coupled to a first mixing vessel coupled to at least one second manifold, wherein the second manifold is coupled to more than one of the first mixers. 
     
     
         3 . The system of  claim 2 , wherein a number of first manifolds is the same as a number of site-isolated reactors. 
     
     
         4 . The system of  claim 2 , wherein a number of first manifolds is the same as a number of second manifolds. 
     
     
         5 . The system of  claim 1 , comprising a plurality of chemicals coupled to the fluid delivery system, wherein the plurality of chemicals is distributed via the first manifold. 
     
     
         6 . The system of  claim 5 , wherein the fluid delivery system is configured to deliver the chemicals to a first site-isolated reactor using a first sequence and to deliver the chemicals to a second site-isolated reactor using a second sequence. 
     
     
         7 . The system of  claim 5 , wherein the fluid delivery system is configured to deliver a first composition of the chemicals to a first site-isolated reactor and to deliver a second composition of the chemicals to a second site-isolated reactor. 
     
     
         8 . The system of  claim 5 , wherein the fluid delivery system is configured to deliver the chemicals to a first site-isolated reactor using a first flow rate and to deliver the chemicals to a second site-isolated reactor using a second flow rate. 
     
     
         9 . The system of  claim 5 , wherein the fluid delivery system is configured to dynamically mix the chemicals delivered to each site-isolated reactor using one or more of the first manifold and the second manifold. 
     
     
         10 . The system of  claim 5 , wherein the fluid delivery system is configured to independently control delivery of the chemicals to at least one subset of the plurality of site-isolated reactors. 
     
     
         11 . The system of  claim 1 , wherein the fluid delivery system is configured to independently control one or more of the temperature and pH in each of the plurality of site-isolated reactors.