Opener for extreme ultra violet lithography reticle pods

Abstract

A two stage opener ( 50 ) for an EUV RSP ( 32, 34 ) includes an outer RSP pod opener ( 42, 44 ) having: 1. a RSP latch mechanism ( 42 rlm ) for latching a sealed outer RSP pod ( 32, 34 ) in place on the RSP pod opener ( 42, 44 ) and 2. a RSP lock/unlock mechanism ( 42 lulm ) for unlocking the RSP pod ( 32, 34 ) so the RSP pod opener ( 42, 44 ) can separate a RSP pod cover ( 32 c, 343 c ) from a RSP pod door ( 32 d, 34 d ). After the RSP lock/unlock mechanism ( 42 lulm ) unlocks the RSP pod ( 32,34 ), the RSP pod opener ( 42, 44 ) separates the RSP pod door ( 32 d, 34 d ) from the RSP pod cover ( 32 c, 34 c ) thereby exposing a metal case ( 20 ). The pod opener ( 50 ) also includes a metal case opener ( 52 ) having at least two ( 2 ) arms ( 56 ) for receiving and supporting the metal case cover ( 22 ) while the two stage pod opener ( 50 ) separates the metal case base ( 24 ) from the metal case cover ( 22 ) thereby exposing the hare reticle ( 26 ) carried on the metal case base ( 24 ).

1 . A two stage pod opener for opening a pod that encloses and carries a photolithographic reticle therein, the pod including:
 a. an outer RSP pod having:
 i. a RSP pod door that is adapted for receiving a metal case, the metal case being adapted for receiving and enclosing a bare reticle; and 
 ii. a RSP pod cover that mates with and locks to the RSP pod door thereby enclosing the metal case within the sealed outer RSP pod, 
   b. the metal case including:
 i. a metal case base that is adapted for receiving the bare reticle; and 
 ii. a metal case cover that mates with the metal case base having the bare reticle received thereon thereby enclosing the bare reticle within the metal case within the sealed outer RSP pod, 
   
       the two stage pod opener comprising:
 a. an outer RSP pod opener that includes:
 i. a RSP latch mechanism for latching the sealed outer RSP pod in place on the outer RSP pod opener; and 
 ii. a RSP lock/unlock mechanism for unlocking the outer RSP pod so the outer RSP pod opener can separate the RSP pod cover from the RSP pod door; 
 after the RSP lock/unlock mechanism unlocks the outer RSP pod, the outer RSP pod opener separating the RSP pod door from the RSP pod cover thereby exposing the metal case; 
 
 b. a metal case opener that includes at least two (2) arms for receiving and supporting the metal case cover while the two stage pod opener separates the metal case base from the metal case cover thereby exposing the bare reticle carried on the metal case base. 
 
     
     
         2 . The two stage pod opener of  claim 1  wherein the outer RSP pod opener includes an elevator adapted for lowering a pod table that receives the RSP pod door of the outer RSP pod when enclosing the bare reticle, the outer RSP pod opener separating the RSP pod door from the RSP pod cover thereby exposing the metal case by lowering the pod table carrying the RSP pod door downward from the RSP pod cover. 
     
     
         3 . The two stage pod opener of  claim 2  wherein a sealed cover about the elevator forestalls contaminating the bare reticle with particles produced by the elevator. 
     
     
         4 . The two stage pod opener of  claim 3  wherein at least one exhaust port coupled to the sealed cover permits establishing a low pressure environment about the elevator. 
     
     
         5 . The two stage pod opener of  claim 2  wherein the pod table also carries the RSP lock/unlock mechanism. 
     
     
         6 . The two stage pod opener of  claim 5  wherein a sealed cover about the RSP lock/unlock mechanism forestalls contaminating the bare reticle with particles produced by the RSP lock/unlock mechanism. 
     
     
         7 . The two stage pod opener of  claim 2  wherein the elevator lowers the RSP pod door to an inner metal case open/close position thereby juxtaposing the metal case carried on the RSP pod door with the metal case opener. 
     
     
         8 . The two stage pod opener of  claim 7  wherein positioning each of the arms of the metal case opener for receiving and supporting the metal case cover includes rotating the arms about respective pivot points. 
     
     
         9 . The two stage pod opener of  claim 8  wherein the two stage pod opener separates the metal case base from the metal case cover by lowering the pod table carrying the RSP pod door downward from the metal case cover. 
     
     
         10 . The two stage pod opener of  claim 1  wherein a sealed cover about the metal case opener forestalls contaminating the bare reticle with particles produced by the metal case opener. 
     
     
         11 . The two stage pod opener of  claim 10  wherein at least one exhaust port coupled to the metal case opener permits establishing a low pressure environment about the metal case opener. 
     
     
         12 . The two stage pod opener of  claim 1  wherein positioning each of the arms of the metal case opener for receiving and supporting the metal case cover includes rotating the arms about respective pivot points. 
     
     
         13 . The two stage pod opener of  claim 12  wherein an elevator included in the two stage pod opener that is adapted for lowering a pod table that receives the RSP pod door of the outer RSP pod that carries the metal case separates the metal case base from the metal case cover by lowering the pod table carrying the RSP pod door downward from the metal case cover. 
     
     
         14 . The two stage pod opener of  claim 13  wherein a sealed cover about the elevator forestalls contaminating the bare reticle with particles produced by the elevator. 
     
     
         15 . The two stage pod opener of  claim 14  wherein at least one exhaust port coupled to the elevator permits establishing a low pressure environment about the elevator.