Substrate material having a mechanical filtering characteristic and method for producing a substrate material

Abstract

A substrate material having a mechanical filtering characteristic, the substrate material having at least one support region for supporting the substrate material. In addition, the substrate material includes a sensor region having sensor terminal contacts. Furthermore, the substrate material includes a separating region, which is coupled to the at least one support region and the sensor region and is situated between the at least one support region and the sensor region. In this context, the substrate material in the separating region has a structure different from the substrate material in the support region and/or in the sensor region, in order to form a mechanical filtering characteristic.

1 - 10 . (canceled) 
     
     
         11 . A substrate material arrangement, comprising:
 a substrate material having a mechanical filtering characteristic;   wherein the substrate material has the following:
 at least one support region for supporting the substrate material, 
 a sensor region having sensor terminal contacts, and 
 a separating region, which is coupled to the at least one support region and the sensor region and is situated between the at least one support region and the sensor region, and 
   wherein the substrate material in the separating region has a structure different from the substrate material in at least one of the support region and the sensor region, so as to form the mechanical filtering characteristic.   
     
     
         12 . The substrate material of  claim 11 , wherein the substrate material in the separating region has a lesser or a greater thickness than the substrate material in at least one of the support region and the sensor region. 
     
     
         13 . The substrate material of  claim 11 , wherein the substrate material in the separating region has at least one opening. 
     
     
         14 . The substrate material of  claim 11 , wherein the separating region includes partial regions having different thicknesses of the substrate material. 
     
     
         15 . The substrate material of  claim 11 , wherein the separating region surrounds the sensor region except for at least one transition region, the separating region being split by the transition region. 
     
     
         16 . The substrate material of  claim 11 , wherein the separating region has a rectangular shape and/or completely surrounds the sensor region. 
     
     
         17 . The substrate material of  claim 11 , wherein at least one of the following is satisfied: (i) the separating region has at least one groove as a structure, and (ii) the separating region completely surrounds the sensor region. 
     
     
         18 . The substrate material of  claim 11 , wherein the separating region is configured to generate a mechanical spring action between the support region and the sensor region. 
     
     
         19 . A sensor unit, comprising:
 a substrate material arrangement, comprising:
 a substrate material having a mechanical filtering characteristic; 
 wherein the substrate material has the following:
 at least one support region for supporting the substrate material, 
 a sensor region having sensor terminal contacts, and 
 a separating region, which is coupled to the at least one support region and the sensor region and is situated between the at least one support region and the sensor region, and 
 
 wherein the substrate material in the separating region has a structure different from the substrate material in at least one of the support region and the sensor region, so as to form the mechanical filtering characteristic; and 
   a sensor element situated on the substrate material in the sensor region and configured to detect mechanical motions or vibrations and to generate a sensor signal characteristic of the mechanical motions or vibrations.   
     
     
         20 . A method for producing a substrate material having a mechanical filtering characteristic, the method comprising:
 providing a substrate board, which includes a support region for supporting the substrate board; and   introducing a structure of a separating region between the support region and a sensor region of the substrate board, the separating region having a structure different from that of the support region and that of the sensor region, so as to obtain the mechanical filtering characteristic.