Self-supporting film, self-supporting structure, method for manufacturing self-supporting film, and pellicle

Abstract

Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.

1 - 18 . (canceled) 
     
     
         19 . A self-supporting film, comprising a rugged-structure layer in which periodic rugged shapes are formed on at least one face. 
     
     
         20 . The self-supporting film according to  claim 19 , wherein an average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. 
     
     
         21 . The self-supporting film according to  claim 19 , wherein the rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater. 
     
     
         22 . The self-supporting film according to  claim 19 , wherein a thickness variability average of the rugged-structure layer is 100 nm or less. 
     
     
         23 . The self-supporting film according to  claim 21 , wherein a thickness variability average of the rugged-structure layer is 100 nm or less. 
     
     
         24 . The self-supporting film according to  claim 19 , wherein in a main component of the rugged-structure layer there is used at least one resin selected from the group consisting of a fluororesin having a perfluoroalkyl ether cyclic structure, a cellulose derivative, and a cycloolefin resin. 
     
     
         25 . The self-supporting film according to  claim 21 , wherein in a main component of the rugged-structure layer there is used at least one resin selected from the group consisting of a fluororesin having a perfluoroalkyl ether cyclic structure, a cellulose derivative, and a cycloolefin resin. 
     
     
         26 . The self-supporting film according to  claim 22 , wherein in a main component of the rugged-structure layer there is used at least one resin selected from the group consisting of a fluororesin having a perfluoroalkyl ether cyclic structure, a cellulose derivative, and a cycloolefin resin. 
     
     
         27 . The self-supporting film according to  claim 23 , wherein in a main component of the rugged-structure layer there is used at least one resin selected from the group consisting of a fluororesin having a perfluoroalkyl cyclic ether structure, a cellulose derivative, and a cycloolefin resin. 
     
     
         28 . The self-supporting film according to  claim 19 , wherein protrusions in the rugged shapes are disposed at a constant periodic spacing. 
     
     
         29 . The self-supporting film according to  claim 19 , wherein the periodic spacing of the protrusions of the rugged shapes is 1.0 μm or less. 
     
     
         30 . The self-supporting film according to  claim 19 , wherein a height of the protrusions of the rugged shapes ranges from 0.5 times to 2.0 times the periodic spacing of the rugged shapes. 
     
     
         31 . The self-supporting film according to  claim 19 , wherein the shape of the protrusions of the rugged shapes is a polyhedral pyramidal shape, a conical shape, a truncated polyhedral pyramidal shape or a truncated conical shape.