Method for drying a substrate

Abstract

A method for drying workpieces includes immersing the workpieces in a liquid bath, raising the workpieces with a first holder until a central opening of the workpieces is visible above liquid surface, then using a dry second holder rod inserted through said central opening to continue raising process. Due to this, a drying portion of the workpiece is not held by a wet holding mechanism.

1 . A method for drying a workpiece ( 14 ), said workpiece having a substantially flat disc shape defining an outer diameter ( 16 ) of said workpiece, and a substantially circumferential opening at a center location defining an inner diameter ( 18 ) of said workpiece, comprising the acts of:
 immersing said workpiece in an unheated liquid bath ( 60 ); and raising said workpiece out of said liquid bath ( 60 ) into a substantially enclosed volume of heated inert gas ( 52 ).