Scalable wideband probes, fixtures, and sockets for high speed ic testing and interconnects

Abstract

We introduce a new Periodic micro coaxial transmission line (PMTL) that is capable of sustaining a TEM propagation mode up to THz band. The PMTL can be manufactured using current photolithographic processes. This transmission line can be embedded in microscopic layers that allow many new applications. We further use the embedded PMTL to develop a modular, scaleable and fully automated Universal Test Fixture for testing chips in various stages of development mainly for digital IC chips that can be utilized in production lines with pick and place of chips on tape to test every chip before insertion into circuits. The PMTL can also provide Confined Field Interconnects between various elements on semiconductor wafers to reduce parasitic and radiation losses and practically eliminating cross talk, thus, increasing the speed of digital IC's. The PMTL is also used to develop a Universal Test Socket, and a Hand Probe.

1 - 41 . (canceled) 
     
     
         42 . A periodic micro coaxial transmission line comprising:
 an inner conductor;   an outer conductor comprising:
 a first dielectric comprising a first channel, wherein the first channel extends along a first axis and comprises metalized walls; 
 a second dielectric comprising a second channel, wherein the second channel is substantially parallel to the first and comprises metalized walls; and 
   a plurality of conductive members electrically connecting the metalized walls of the first channel to the metalized walls of the second channel, said conductive members arranged along the first and second channels,   wherein the first and second channels substantially surround the inner conductor.   
     
     
         43 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are filled with air. 
     
     
         44 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are filled with an insulator. 
     
     
         45 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are filled with a low-loss dielectric. 
     
     
         46 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are filled with a gas. 
     
     
         47 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are filled with a foam. 
     
     
         48 . The periodic micro coaxial transmission line of  claim 42 , wherein the channels of said first and second dielectrics are under vacuum or filled with a low pressure gas. 
     
     
         49 . The periodic micro coaxial transmission line of  claim 42 , wherein said inner conductor comprises:
 a first inner conducting strip;   a second inner conducting strip substantially parallel to said first conducting strip; and   a plurality of inner conductive members electrically connecting said first inner conducting strip to said second inner conducting strip, said inner conductive members arranged along said first and second inner conducting strips.   
     
     
         50 . The periodic micro coaxial transmission line of  claim 42 , wherein the inner conductor is suspended within the cavity created by the first and second channels. 
     
     
         51 . The periodic micro coaxial transmission line of  claim 42 , wherein the first and second dielectrics comprise a plurality of dielectric layers. 
     
     
         52 . The periodic micro coaxial transmission line of  claim 42 , wherein the outer conductor is formed from channels created in one or more layers of PCB. 
     
     
         53 . A periodic micro coaxial transmission line comprising:
 an inner elongated conductor; and   an elongated conductive shield positioned around said inner conductor and forming an elongated cavity,   wherein said inner conductor is suspended in the elongated cavity by at least one dielectric layer such that the inner conductor is spaced from the shield.   
     
     
         54 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is filled with air. 
     
     
         55 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is filled with an insulator. 
     
     
         56 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is filled with a low-loss dielectric. 
     
     
         57 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is filled with a gas. 
     
     
         58 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is filled with a foam. 
     
     
         59 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated cavity is under vacuum or filled with a low pressure gas. 
     
     
         60 . The periodic micro coaxial transmission line of  claim 53 , wherein the elongated conductive shield is formed from channels created in one or more layers of PCB. 
     
     
         61 . The periodic micro coaxial transmission line of  claim 53 , wherein said inner conductor comprises:
 a first inner conducting strip;   a second inner conducting strip substantially parallel to said first conducting strip; and   a plurality of inner conductive members electrically connecting said first inner conducting strip to said second inner conducting strip, said inner conductive members arranged along said first and second inner conducting strips.