MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTERING TARGET

Abstract

Disclosed are a manufacturing method for a LiCoO 2 sintered body, said manufacturing method enabling the safe manufacturing of a high density sintered body, and a sputtering target. The LiCoO 2 sintered body manufacturing method includes a step in which LiCoO 2 powder is filled into a mold. The pressure inside the mold is reduced, and the LiCoO 2 powder is pressure sintered inside the mold at a temperature between 800° C. and 880° C. inclusive. The above method enables the safe production of a LiCoO 2 sintered body having a relative density of at least 95% and an average particle diameter of 10 μm-30 μm inclusive.

1 . A manufacturing method for a LiCoO 2  sintered body, comprising:
 filling a LiCoO 2  powder into a mold;   reducing a pressure inside the mold; and   applying pressure sintering to the LiCoO 2  powder in the mold at a temperature of equal to or higher than 800° C. and equal to or lower than 880° C.   
     
     
         2 . The manufacturing method for a LiCoO 2  sintered body according to  claim 1 , wherein
 the step of applying pressure sintering to the LiCoO 2  powder includes applying a pressure to the LiCoO 2  powder in the mold at a pressure of 200 kg/cm 2  or higher.   
     
     
         3 . The manufacturing method for a LiCoO 2  sintered body according to  claim 2 , wherein
 the LiCoO 2  powder is applied with pressure sintering by a vacuum hot press method.   
     
     
         4 . The manufacturing method for a LiCoO 2  sintered body according to  claim 2 , wherein
 the LiCoO 2  powder is applied with pressure sintering by a hot isostatic press method.   
     
     
         5 . A sputtering target including a LiCoO 2  sintered body and having a relative density of 95% or more and an average particle size of equal to or larger than 10 μm and equal to or smaller than 30 μm.