Manufacturing Apparatus and Manufacturing Method of Light-Emitting Device

Abstract

Demands such as higher definition, higher opening aperture, and higher reliability on a full-color flat panel display have been increased. Such demands are big objects in advancing higher definition (increase in the number of pixels) of a light-emitting device and miniaturization of each display pixel pitch with reduction in size of the light-emitting device. An organic compound-containing layer is selectively deposited using a laser beam which passes through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer containing an organic compound and a deposition substrate provided with first electrodes are placed so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapping with the heated region is vaporized, and accordingly the organic compound is selectively deposited over the deposition substrate.

1 . A manufacturing apparatus comprising:
 a light source unit emitting laser light;   an optical system forming the laser light into a rectangular laser beam or a linear laser beam;   a light control unit selectively blocking or reflecting the rectangular laser beam or the linear laser beam;   a scanning unit making a light absorption layer provided for an irradiated substrate be scanned by a laser beam that has passed through the light control unit; and   an alignment unit performing alignment of the light control unit, the irradiated substrate, and a deposition substrate,   wherein the laser beam that has passed through the light control unit heats the light absorption layer, and the light absorption layer heats a first material layer provided for the irradiated substrate so that at least part of the first material layer is gasified, and a second material layer is formed on the deposition substrate placed facing the irradiated substrate.   
     
     
         2 . The manufacturing apparatus according to  claim 1 , further comprising a control apparatus controlling the light source unit, the light control unit, and the scanning unit. 
     
     
         3 . The manufacturing apparatus according to  claim 1 , wherein a long side direction of the rectangular laser beam or the linear laser beam and a scanning direction with the scanning unit are at right angles to each other. 
     
     
         4 . The manufacturing apparatus according to  claim 1 , wherein the irradiated substrate is a light-transmitting substrate. 
     
     
         5 . The manufacturing apparatus according to  claim 1 , wherein the light control unit is selected from the group consisting of a photomask, a slit, or a metal mask. 
     
     
         6 . A manufacturing apparatus comprising:
 a light source unit emitting laser light;   an optical system forming the laser light into a rectangular laser beam or a linear laser beam;   a light control unit selectively blocking or reflecting the rectangular laser beam or the linear laser beam;   a scanning unit making a gas generation layer provided for an irradiated substrate be scanned by a laser beam that has passed through the light control unit; and   an alignment unit performing alignment of the light control unit, the irradiated substrate, and a deposition substrate, the irradiated substrate being stacked with the gas generation layer and a first material layer,   wherein the laser beam that has passed through the light control unit heats the gas generation layer provided for the irradiated substrate to gasify the gas generation layer, and   wherein a second material layer is formed on the deposition substrate placed facing the irradiated substrate.   
     
     
         7 . The manufacturing apparatus according to  claim 6 , further comprising a control apparatus controlling the light source unit, the light control unit, and the scanning unit. 
     
     
         8 . The manufacturing apparatus according to  claim 6 , wherein a long side direction of the rectangular laser beam or the linear laser beam and a scanning direction with the scanning unit are at right angles to each other. 
     
     
         9 . The manufacturing apparatus according to  claim 6 , wherein the irradiated substrate is a light-transmitting substrate. 
     
     
         10 . The manufacturing apparatus according to  claim 6 , wherein the light control unit is selected from the group consisting of a photomask, a slit, or a metal mask. 
     
     
         11 - 16 . (canceled)