Laser scanning microscope and its operating method

Abstract

Laser scanning microscope and its operating method in which at least two first and second scanning systems activated independently of each other and that can move in at least one direction illuminate a sample with the help of a beam-combining element, and the light is detected by the sample as it comes in, The scanning fields created by the light distributions on the sample mutually overlap to create a reference pattern on the sample with one of the light distributions, which is then captured and used to create the overlap using the second light distribution and/or a reference pattern arranged in the sample plane or in an intermediate image plane is captured by both scanning fields and used to create the overlap and/or structural characteristics of the sample are captured by the two scanning fields as reference pattern and used to create the overlap in which correction values are determined.

1 . Method of operating a laser scanning microscope having a manipulation scanning system and an imaging scanning system having respective scan fields defined by respective first and second illuminating lights independently controlled in the x- and y-directions, and a beam-combiner for combining the illuminating lights of the manipulation and imaging scanning systems, the manipulation scanning system being controllable to provide a stationary focus, the method comprising the steps of:
 creating a reference pattern of a minimum of three different points on an unstructured sample in the scan field of the manipulation scanning system through illumination-induced modification of the sample by stationary focus of the first illuminating light at a minimum of three different scan field positions;   using the imaging scanning system to detect an image of the reference pattern created on the sample in the step of creating the reference pattern;   creating an overlap of the reference pattern created with the manipulation scanning system with the image of the reference pattern detected by the imaging scanning system   determining position deviations of coordinates of the scan fields of the manipulation and imaging scanning systems from each other based on the overlap;   using the position deviations to compute coordinate transformations for bringing the coordinates of the scan fields of the manipulation and imaging scanning systems into line with each other; and   taking into account the coordinate transformations in controlling at least one of the manipulation and imaging scanning systems, for at least one of:
 calibrating at least one of the manipulation and imaging scanning systems, and 
 achieving pixel-precise coverage of the scan field of the manipulation scanning system with the object field of the imaging scanning systems. 
   
     
     
         2 . (canceled) 
     
     
         3 . (canceled) 
     
     
         4 . Method of operating a laser scanning microscope according to  claim 1 , wherein the imaging scanning system is used to illuminate the reference pattern. 
     
     
         5 . (canceled) 
     
     
         6 . (canceled) 
     
     
         7 . Method of operating a laser scanning microscope according to  claim 1 , wherein the reference pattern is created using light reflected by the sample at the different scan field positions. 
     
     
         8 . Method of operating a laser scanning microscope according to  claim 1 , further comprising the step of generating a frequency-converted light through a non-linear or linear interaction of the first illuminating light with the sample, wherein the frequency-converted light is detected by the imaging scanning system and used to create the overlap. 
     
     
         9 . Method of operating a laser scanning microscope according to  claim 8 , in which at least three luminescence points are created on the sample. 
     
     
         10 . Method of operating a laser scanning microscope according to  claim 8 , wherein the reference pattern is created through inelastic light scattering. 
     
     
         11 . (canceled) 
     
     
         12 . (canceled) 
     
     
         13 . Method of operating a laser scanning microscope according to  claim 1 , in which a statistical distribution structure of the sample itself serves as the reference pattern. 
     
     
         14 . (canceled) 
     
     
         15 . Method of operating a laser scanning microscope according to  claim 1 , wherein the coordinate transformation is an affine transformation having at least three reference points. 
     
     
         16 . Method of operating a laser scanning microscope according to  claim 1 , in which a point-scanning or line-scanning system, or a scanning point distribution system or a Nipkow system is used as the imaging scanning system. 
     
     
         17 . Method of operating a laser scanning microscope according to  claim 1 , in which the manipulation scanning system is a point scanning device, and the scanning takes place in two directions. 
     
     
         18 . A laser scanning microscope comprising:
 manipulation and imaging scanning systems having respective scan fields defined by first and second illuminating lights independently controlled in the x- and y-directions, the manipulation scanning system being controllable to provide a stationary focus of the first illumination light on an unstructured sample for creating a reference pattern of a minimum of three different points on the unstructured sample in the scan field thereof through modification-inducing illumination of the sample by the first illumination light at a minimum of three different scan field positions,   a beam-combiner for combining the illuminating lights of the manipulation and imaging scanning systems,   at least one detector in the imaging scanning system for detecting an image of the reference pattern created on the sample; and   means for creating an overlap of the reference pattern created by the manipulation scanning system with the image of the reference pattern detected by the at least one detector, for determining position deviations of coordinates of the scan fields of the manipulation and imaging scanning systems from each other based on the overlap, and for taking into account the coordinate transformations in controlling at least one of the manipulation and imaging scanning systems, for at least one of:
 calibrating at least one of the manipulation and imaging scanning systems, and 
 achieving pixel-precise coverage of the scan field of the manipulation scanning system with the object field of the imaging scanning systems. 
   
     
     
         19 . (canceled) 
     
     
         20 . Laser scanning microscope according to  claim 18 , in which the imaging scanning system is a point-scanning system, a line-scanning system, a scanning point distribution system or a Nipkow system. 
     
     
         21 . Laser scanning microscope according to  claim 18 , in which the manipulating scanning system is a point scanner and the scanning takes place in two directions. 
     
     
         22 . Laser scanning microscope according to  claim 18 , with at least one laser as the illuminating light. 
     
     
         23 . Laser scanning microscope according to  claim 18 , in which a movement takes place over the sample in at least one scanning direction. 
     
     
         24 . Laser scanning microscope according to  claim 18 , wherein the manipulation scanning system further comprises a beam deflecting device. 
     
     
         25 . Laser scanning microscope according to  claim 24 , wherein the beam deflecting device includes a Galvo scanner and a control unit for the Galvo scanner, wherein a coordinate transformation takes place through the modification of gain and offset values of the control unit. 
     
     
         26 . Method of operating a laser scanning microscope according to  claim 1 , wherein the imaging scanning system directly detects the illumination of the sample. 
     
     
         27 . Method of operating a laser scanning microscope according to  claim 1 , wherein the illumination of the sample with the stationary focus of the manipulation scanning system creates a frequency conversion, and the imaging scanning system indirectly detects the frequency-converted illumination of the sample. 
     
     
         28 . Method of operating a laser scanning microscope according to  claim 1 , wherein in the step of creating a reference pattern, the modification induced by the modification-inducing illumination is limited exclusively to the area of the stationary focus of the manipulating scanning system, and is at least temporarily stable, and the step of using the imaging scanning system to detect an image of the reference pattern is carried separately from the step of creating a reference pattern, after the reference pattern is created. 
     
     
         29 . Method of operating a laser scanning microscope according to  claim 28 , wherein in the step of creating a reference pattern, the modification-inducing illumination of the sample with the stationary focus of the manipulation scanning system is carried out by turning on and turning off of the illuminating light of the manipulation scanning system at the different scan field positions. 
     
     
         30 . Method of operating a laser scanning microscope according to  claim 1 , wherein in the step of creating a reference pattern, for the stationary focus, the manipulation scanning system is controlled to rest while directed at each scan field position and after that to jump to the next scan field position. 
     
     
         31 . Method of operating a laser scanning microscope according to  claim 1 , wherein in the step of creating a reference pattern, for the stationary focus, the manipulation scanning system is controlled to move over the sample and the modification-inducing illumination is switched on and off at each scan field position. 
     
     
         32 . Method of operating a laser scanning microscope according to  claim 15 , wherein the affine transformation is used to determine image coverage parameters including offset (zero position), angle (mutual rotation) and three stretching parameters; and
 wherein in the step of taking into account the coordinate transformations, the image coverage parameters are used to control a beam deflecting device of the manipulating scanning system to provide the pixel-precise coverage with the object field of the imaging scanning system.   
     
     
         33 . Method of operating a laser scanning microscope according to  claim 1 , wherein scanning of the first and second illuminating lights is identical in the z-direction, and wherein the method further comprises the step of aligning the z-scan planes to overlap fully. 
     
     
         34 . Method of operating a laser scanning microscope according to  claim 1 , wherein the first and second illumination lights of the manipulation scanning system and the imaging scanning system are independently controlled in the z-direction, and wherein in the step of using the position deviations to compute coordinate transformations, the coordinate transformations are transformations in three-dimensional space. 
     
     
         35 . Method of operating a laser scanning microscope having a manipulation scanning system and an imaging scanning system having respective scan fields defined by respective first and second illuminating lights independently controlled in the x- and y-directions, and a beam-combiner for combining the illuminating lights of the manipulation and imaging scanning systems, the manipulation scanning system and the imaging scanning system each having a programmable, automatically controllable beam deflecting device, the method comprising the steps of:
 arranging a structured reference pattern in the form of a grid in the plane of the sample or an intermediate image plane;   following the step of arranging of the reference pattern, detecting an image of the reference pattern with the manipulation scanning system and with the imaging scanning system independently of each other;   creating an overlap of the image of the reference pattern detected with the manipulation scanning system with the image of the reference pattern detected with the imaging scanning system;   determining position deviations of the image of the reference pattern detected with the manipulation scanning system from the image of the reference pattern detected with the imaging scanning system, based on the overlap;   using the position deviations to compute coordinate transformations for bringing the images of the reference pattern detected with the manipulation scanning system and with the imaging scanning system into line with each other; and   using the coordinate transformations to adjust the beam deflecting device of at least one of the manipulation scanning system and the imaging scanning system to bring the images of the reference pattern into line with each other.   
     
     
         36 . Method of operating a laser scanning microscope according to  claim 35 , wherein the coordinate transformation is an affine transformation having at least three reference points. 
     
     
         37 . Method of operating a laser scanning microscope according to  claim 36 , wherein the affine transformation is used to determine image coverage parameters including offset (zero position), angle (mutual rotation) and three stretching parameters; and
 wherein in the step of taking into account the coordinate transformations, the image coverage parameters are used to control a beam deflecting device of the manipulating system to provide a pixel-precise coverage with the object field of the imaging scanning system.   
     
     
         38 . A laser scanning microscope comprising:
 a structured reference pattern in the form of a grid arranged in the plane of a sample or an intermediate image plane,   a manipulation scanning system and an imaging scanning system having respective scan fields defined by independently-controlled first and second illuminating lights for independently illuminating the reference pattern, at least one of the manipulation scanning system and the imaging scanning system having a programmable, automatically controllable beam deflecting device,   a beam-combiner for combining the illuminating lights of the manipulation and imaging scanning systems,   means for detecting independently from each other first and second images of the reference pattern resulting respectively from illumination of the reference pattern by the first and second illumination lights, and   means for creating an overlap of the independently detected first and second images, for determining position deviations of coordinates of the scan fields of the manipulation and imaging scanning systems from each other based on the overlap, and for using the coordinate transformations to adjust the beam deflecting device of at least one of the manipulation scanning system and the imaging scanning system to bring the images of the reference pattern into line with each other.