US2012267780A1PendingUtilityA1
Chip package and method for forming the same
Est. expiryApr 21, 2031(~4.8 yrs left)· nominal 20-yr term from priority
H10W 90/722H10W 90/291H10W 72/07251H10W 72/20H10W 90/00H10P 54/00
47
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Claims
Abstract
An embodiment of the invention provides a chip package which includes: a first chip; a second chip disposed on the first chip, wherein a side surface of the second chip is a chemically-etched surface; and a bonding bulk disposed between the first chip and the second chip such that the first chip and the second chip are bonded with each other.
Claims
exact text as granted — not AI-modified1 . A chip package, comprising:
a first chip; a second chip disposed on the first chip, wherein a side surface of the second chip is a chemically-etched surface; and a bonding bulk disposed between the first chip and the second chip such that the first chip and the second chip are bonded with each other.
2 . The chip package as claimed in claim 1 , wherein the first chip has a thickness larger than that of the second chip.
3 . The chip package as claimed in claim 1 , wherein a side surface of the first chip is a diced surface.
4 . The chip package as claimed in claim 1 , wherein the side surface of the second chip has a roughness smaller than that of a side surface of the first chip.
5 . The chip package as claimed in claim 1 , wherein the side surface of the second chip has a roughness larger than that of a side surface of the first chip.
6 . The chip package as claimed in claim 1 , wherein a side surface of the first chip is a chemically-etched surface.
7 . The chip package as claimed in claim 1 , wherein a side surface of the bonding bulk closest to the side surface of the second chip is coplanar with the side surface of the second chip.
8 . The chip package as claimed in claim 1 , wherein a side surface of the bonding bulk closest to the side surface of the second chip is not coplanar with the side surface of the second chip.
9 . The chip package as claimed in claim 1 , wherein a width of the first chip is larger than that of the second chip.
10 . The chip package as claimed in claim 1 , further comprising:
a protecting layer disposed on the second chip; and a conducting bump disposed on the second chip and penetrating the protection layer to electrically connect to a conducting region on the second chip.
11 . A method for forming a chip package, comprising:
providing a first substrate; providing a second substrate; forming at least a bonding bulk on an upper surface of the first substrate and/or on a lower surface of the second substrate; bonding the second substrate onto the first substrate through the bonding bulk; forming a first protection layer on an upper surface of the second substrate, wherein the first protection layer has an opening exposing a predetermined scribe region of the second substrate; using the first protection layer as a mask to etch and remove a portion of the second substrate located in the predetermined scribe region to form a through-hole exposing the first substrate; and partially removing the first substrate exposed by the through-hole to form at least one chip package.
12 . The method for forming a chip package as claimed in claim 11 , wherein the step of partially removing the first substrate exposed by the through-hole to form at least one chip package comprises using a dicing blade to cut through the first substrate.
13 . The method for forming a chip package as claimed in claim 12 , wherein a width of the dicing blade is smaller than that of the predetermined scribe region.
14 . The method for forming a chip package as claimed in claim 11 , wherein the step of partially removing the first substrate exposed by the through-hole to form at least one chip package comprises using an etching process to remove the exposed first substrate such that the first substrate is divided into a plurality of sections.
15 . The method for forming a chip package as claimed in claim 11 , wherein the bonding bulk extends into the predetermined scribe region.
16 . The method for forming a chip package as claimed in claim 11 , wherein the bonding bulk does not extend into the predetermined scribe region.
17 . The method for forming a chip package as claimed in claim 11 , wherein a side surface of the bonding bulk is coplanar with a boundary of the predetermined scribe region.
18 . The method for forming a chip package as claimed in claim 11 , further comprising:
forming a second protection layer on the second substrate, wherein the second protection layer has an opening exposing a conducting region on the second substrate; and forming a conducting bump on the exposed conducting region.
19 . The method for forming a chip package as claimed in claim 18 , wherein the steps of forming the second protection layer and the conducting bump are performed after the step of etching and removing a portion of the second substrate is performed and before the step of partially removing the first substrate exposed by the through-hole to form at least one chip package is performed.
20 . The method for forming a chip package as claimed in claim 11 , further comprising removing the first protection layer after the through-hole is formed.Join the waitlist — get patent alerts
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