Method for storing a pellicle

Abstract

There is provided a method for packing a pellicle container in plastic resin bags, which is meant to prevent foreign particles from reaching the pellicle container and eventually the product pellicle; the points of the invention lie in that bags are either antistatic or of special cleanroom-use grade prepared and preserved in a cleanroom environment.

1 . A pellicle storing method comprising steps of placing a container containing a pellicle in a first bag of cleanroom-use grade, closing an opening of said first bag, placing said first bag in a second bag having an antistatic function, closing an opening of said second bag, placing said second bag in a third bag having an antistatic function, and closing an opening of said third bag. 
     
     
         2 . A method as claimed in  claim 1 , wherein said first bag has been manufactured and preserved in a cleanroom of cleanliness class 1000 or cleaner. 
     
     
         3 . A method as claimed in  claim 1 , wherein said bags having an antistatic function have a surface resistance of 9.9×10 11  ohm/cm 2  or lower. 
     
     
         4 . A method as claimed in  claim 1 , wherein said method including bag closing steps are conducted in a cleanroom of cleanliness class 1 or cleaner.