Template for three-dimensional thin-film solar cell manufacturing and methods of use

Abstract

A template 100 for three-dimensional thin-film solar cell substrate formation for use in three-dimensional thin-film solar cells. The template 100 comprises a substrate which comprises a plurality of posts 102 and a plurality of trenches 104 between said plurality of posts 102 . The template 100 forms an environment for three-dimensional thin-film solar cell substrate formation.

1 . A template for three-dimensional thin-film solar cell substrate formation, comprising:
 a template substrate, said template substrate comprising:   a plurality of posts; and   a plurality of trenches between said plurality of posts,   wherein said template forms an environment for three-dimensional thin-film solar cell substrate formation.   
     
     
         2 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said template forms an environment for three-dimensional thin-film solar cell substrate formation through a plurality of iterations of three-dimensional thin-film solar cell substrate formation without a need for substantial reconditioning of said template prior to each iteration. 
     
     
         3 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said template substrate comprises a semiconductor substrate. 
     
     
         4 . The template for three-dimensional thin-film solar cell substrate formation of  claim 3 , wherein said semiconductor substrate comprises a silicon substrate. 
     
     
         5 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of posts comprises a plurality of prism-shaped posts. 
     
     
         6 . The template for three-dimensional thin-film solar cell substrate formation of  claim 5 , wherein said plurality of prism-shaped posts comprises a plurality of hexagonal-prism posts. 
     
     
         7 . The template for three-dimensional thin-film solar cell substrate formation of  claim 5 , wherein said plurality of prism-shaped posts comprises a plurality of polygon-prism posts. 
     
     
         8 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of posts comprises a plurality of tapered posts. 
     
     
         9 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of posts comprises a plurality of near-vertical posts. 
     
     
         10 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches between said plurality of posts comprises a plurality of within-wafer trenches. 
     
     
         11 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches between said plurality of posts comprises a plurality of through-wafer trenches. 
     
     
         12 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches between said plurality of posts comprises a plurality of wider trenches on top of narrower and deeper trenches. 
     
     
         13 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches between said plurality of posts further comprises a plurality of channels to provide etchant access. 
     
     
         14 . A method for fabrication of a template for three-dimensional thin-film solar cell substrate formation, the method comprising:
 removing semiconductor material from select regions of a semiconductor substrate to form a plurality of posts and a plurality of trenches,   wherein said template forms an environment for three-dimensional thin-film solar cell substrate formation.   
     
     
         15 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 14 , wherein said step of removing semiconductor material from select regions of a semiconductor substrate to form a plurality of posts and a plurality of trenches comprises:
 lithography patterning to produce a design on said semiconductor substrate; and   transferring said design onto said semiconductor substrate using an etching process.   
     
     
         16 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 15 , wherein said etching process comprises a deep reactive-ion etching process. 
     
     
         17 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 15 , wherein said design comprises a prism-shaped design. 
     
     
         18 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of claim  17 , wherein said prism-shaped design comprises a hexagonal-prism design. 
     
     
         19 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 17 , wherein said prism-shaped design comprises a polygon-prism design. 
     
     
         20 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 14 , wherein said step of removing semiconductor material from select regions of a semiconductor substrate to form a plurality of posts and a plurality of trenches comprises laser micromachining to produce a design on said semiconductor substrate. 
     
     
         21 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 20 , wherein said design comprises a prism-shaped design. 
     
     
         22 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 21 , wherein said prism-shaped design comprises a hexagonal-prism design. 
     
     
         23 . The method for fabrication of a template for three-dimensional thin-film solar cell substrate formation of  claim 21 , wherein said prism-shaped design comprises a polygon-prism design. 
     
     
         24 . The method for three-dimensional thin-film solar cell substrate formation of  claim 14 , wherein said step of removing semiconductor material from select regions of a semiconductor substrate to form a plurality of posts and a plurality of trenches further comprises removing semiconductor material from select regions of said semiconductor substrate to form channels in said semiconductor substrate to provide etchant access. 
     
     
         25 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said template is a reusable template used for fabrication of a plurality of three-dimensional thin-film solar cell substrates. 
     
     
         26 . The template for three-dimensional thin-film solar cell substrate formation of  claim 25 , wherein said template is reconditioned after a pre-specified number of reuse iterations in order to extend its ultimate iteration cycles. 
     
     
         27 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches comprises a honeycomb-shaped trench pattern. 
     
     
         28 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of posts comprises a plurality of vertical posts. 
     
     
         29 . The template for three-dimensional thin-film solar cell substrate formation of  claim 1 , wherein said plurality of trenches between said plurality of posts comprises a plurality of wider tapered trenches stacked on narrower tapered trenches. 
     
     
         30 . The template for three-dimensional thin-film solar cell substrate formation of  claim 13 , wherein said plurality of channels to provide etchant access are formed through the template backside. 
     
     
         31 . The template for three-dimensional thin-film solar cell substrate formation of  claim 13 , wherein said plurality of channels to provide etchant access are formed through the template frontside. 
     
     
         32 . The template for three-dimensional thin-film solar cell substrate formation of  claim 13 , wherein said plurality of channels to provide etchant access are through-wafer channels. 
     
     
         33 . The method for three-dimensional thin-film solar cell substrate formation of  claim 24 , wherein at least a subset of said channels in said semiconductor substrate to provide etchant access directly connect to at least a subset of said plurality of trenches. 
     
     
         34 . The method for three-dimensional thin-film solar cell substrate formation of  claim 24 , wherein said channels in said semiconductor substrate to provide etchant access do not connect directly to said plurality of trenches.