US2012164412A1PendingUtilityA1
Formation of Photoconductive and Photovoltaic Films
Est. expiryFeb 17, 2024(expired)· nominal 20-yr term from priority
Inventors:George Engle
C23C 16/50C23C 16/4485H01J 37/34C23C 14/0623C23C 14/34Y10T428/24942C23C 14/3464H01J 37/32009C23C 16/02
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Claims
Abstract
The present application discloses a method and system of depositing a lead selenide film onto another material. The lead selenide film may used in a photoconductive application or a photovoltaic application. Furthermore, the applications may be responsive to infrared radiation at ambient temperature. In one embodiment, a method includes sputtering the lead selenide film, performing a sensitization process, and applying a passivation film. In one exemplary embodiment, a p-n junction is formed by directly adhering a lead selenide film to a silicon substrate.
Claims
exact text as granted — not AI-modified1 . A substrate comprising:
a lead selenide film directly adhered to the substrate, wherein the material of the substrate has a coefficient of thermal expansion different than lead selenide material; wherein the substrate is configured to respond to infrared radiation at ambient temperature.
2 . The substrate of claim 1 , wherein the substrate is a silicon substrate,
3 . The substrate of claim 1 , absent a glass layer between the lead selenide film and the substrate.
4 . The substrate of claim 3 , wherein the lead selenide film is configured for at least one of photoconductive and photovoltaic applications.
5 . The substrate of claim 1 , further comprising a passivation film on the lead selenide film, wherein the passivation film is configured to substantially eliminate alteration of electrical properties of the substrate in response to exposure to contaminants.
6 . The substrate of claim 1 , wherein the substrate is a silicon substrate or a gallium arsenide substrate.
7 . The substrate of claim 1 , wherein the substrate is configured to respond to infrared radiation at ambient temperature by sensitizing the substrate, and wherein the sensitizing the substrate comprises:
removing contaminants from a process chamber; the process chamber with an inert gas; and adding a combination of halogen, gas, nitrogen gas, and oxygen gas to the process chamber, wherein the process chamber is heated to about 300° C.
8 . The substrate of claim 1 , wherein the halogen gas is at least one of fluorine, chlorine, bromine, iodine, and astatine.
9 . The substrate of claim 1 , wherein the inert gas is nitrogen gas, and wherein the pressure of the process chamber is in the range of atmospheric pressure to 3 pounds per square inch.
10 . The substrate of claim 1 , wherein the lead selenide film is configured for a photoconductive response greater than 10%.
11 . A method for creating a p-n junction on a substrate, said method comprising:
sputtering a lead selenide film on the substrate, wherein the material of the substrate has a coefficient of thermal expansion different than lead selenide material; heating the substrate in the range of 300°-400° C.; and configuring a photovoltaic response of the lead selenide film to infrared radiation at ambient temperature.
12 . The method of claim 11 , wherein the substrate is a silicon substrate.
13 . The method of claim 11 , wherein the substrate is a gallium arsenide substrate.
14 . The method of claim 11 , wherein the configuring the photovoltaic response comprises adding dopant materials to a sputtering target used in the sputtering the lead selenide film.
15 . The method of claim 11 , wherein the configuring the photovoltaic response comprises adding a gas to a sputtering target used in the sputtering the lead selenide film.
16 . The method of claim 11 , wherein the configuring the photovoltaic response comprises sensitizing the substrate, and wherein the sensitizing the substrate comprises:
removing contaminants from a process chamber; filling the process chamber with an inert gas; and adding a combination of halogen gas, nitrogen gas, and oxygen gas to the process chamber, wherein the process chamber is heated to about 300° C.
17 . The method of claim 16 , wherein the inert gas is nitrogen gas, and wherein the pressure of the process chamber is in the range of atmospheric pressure to 3 pounds per square inch.
18 . The method of claim 16 , further comprising:
adjusting a gas ratio of the combination of halogen gas, nitrogen gas, and oxygen gas; and configuring electrical properties of the substrate via adjusting a time of exposure of the substrate to the combination of halogen gas, nitrogen gas, and oxygen gas.
19 . The method of claim 16 , wherein the halogen gas is at least one of fluorine, chlorine, bromine, iodine, and astatine.
20 . The method of claim 11 , wherein the lead selenide film is configured for a photoconductive response greater than 7%.Join the waitlist — get patent alerts
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