Turbo Molecular Pump with Improved Blade Structures

Abstract

The present invention discloses a turbo molecular pump with improved blade structures. The turbo molecular pump comprises a rotor and a stator, wherein the rotor includes five rotor blade assemblies and the stator includes five stator blade assemblies, and wherein the blade number and the blade angle of each rotor blade assembly and stator blade assembly are adjusted to optimization, so as to enhance the pumping speed and the stability of the turbo molecular pump as well as to reduce the difficulty for manufacturing the turbo molecular pump.

1 . A turbo molecular pump with improved blade structures comprising:
 a rotor comprising:
 a center shaft; 
 a first layered rotor blade assembly being disposed on the center shaft, wherein the blade number of the first layered rotor blade assembly is 16˜17 pieces, and the blade angle of the first layered rotor blade assembly being 37˜45 degree; 
 a second layered rotor blade assembly being disposed on the center shaft and contiguous to the first layered rotor blade assembly, wherein the blade number of the second layered rotor blade assembly is 32˜33 pieces, and the blade angle of the second layered rotor blade assembly being 45˜50 degree; 
 a third layered rotor blade assembly being disposed on the center shaft, and the third layered rotor blade assembly and the first layered rotor blade assembly being disposed on opposite side of the second layered rotor blade assembly, wherein the blade number of the third layered rotor blade assembly is 30˜31 pieces, and the blade angle of the third layered rotor blade assembly being 30˜40 degree; 
 a fourth layered rotor blade assembly being disposed on the center shaft, and the fourth layered rotor blade assembly and the second layered rotor blade assembly being disposed on opposite side of the third layered rotor blade assembly, wherein the blade number of the fourth layered rotor blade assembly is 28˜29 pieces, and the blade angle of the fourth layered rotor blade assembly being 25˜30 degree; 
 a fifth layered rotor blade assembly being disposed on the center shaft, and the fifth layered rotor blade assembly and the third layered rotor blade assembly being disposed on opposite side of the fourth layered rotor blade assembly, wherein the blade number of the fifth layered rotor blade assembly is 26˜27 pieces, and the blade angle of the fifth layered rotor blade assembly being 15˜22 degree; and 
   a stator comprising:
 a first layered stator blade assembly being disposed between the first layered rotor blade assembly and the second layered rotor blade assembly, wherein the blade number of the first layered stator blade assembly is 50˜52 pieces, and the blade angle of the first layered stator blade assembly being 45˜70 degree; 
 a second layered stator blade assembly being disposed between the second layered rotor blade assembly and the third layered rotor blade assembly, wherein the blade number of the second layered stator blade assembly is 50˜52 pieces, and the blade angle of the second layered stator blade assembly being 48˜70 degree; 
 a third layered stator blade assembly being disposed between the third layered rotor blade assembly and the fourth layered rotor blade assembly, wherein the blade number of the third layered stator blade assembly is 50˜52 pieces, and the blade angle of the third layered stator blade assembly being 40˜70 degree; 
 a fourth layered stator blade assembly being disposed between the fourth layered rotor blade assembly and the fifth layered rotor blade assembly, wherein the blade number of the fourth layered stator blade assembly is 34˜36 pieces, and the blade angle of the fourth layered stator blade assembly being 28˜40 degree; and 
 a fifth layered stator blade assembly being disposed on opposite side of the fifth layered rotor blade assembly relative to the fourth layered stator blade assembly, wherein the blade number of the fifth layered stator blade assembly is 34˜36 pieces, and the blade angle of the fifth layered stator blade assembly being 22˜40 degree. 
   
     
     
         2 . The turbo molecular pump with improved blade structures according to  claim 1 , wherein the rotor is made of the material selected from the group consisting of: pure aluminum, aluminum alloy, copper, gold, steel, iron, cast metal, and stainless steel. 
     
     
         3 . The turbo molecular pump with improved blade structures according to  claim 1 , wherein the stator is made of the material selected from the group consisting of: pure aluminum, aluminum alloy, copper, gold, steel, iron, cast metal, and stainless steel. 
     
     
         4 . The turbo molecular pump with improved blade structures according to  claim 1 , wherein the first layered stator blade assembly, the second layered stator blade assembly, the third layered stator blade assembly, the fourth layered stator blade assembly, and the fifth layered stator blade assembly further comprise a stator shroud respectively, each stator shroud being able to fasten the blades of each layered stator blade assembly, and for combining the stator blade assemblies to each other.