US2012145724A1PendingUtilityA1
Vacuum container
Est. expiryDec 14, 2030(~4.4 yrs left)· nominal 20-yr term from priority
Inventors:Daisuke Kobinata
H10P 72/1916C23C 14/56C23C 16/4409
27
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Claims
Abstract
A vacuum container which has a seal member in fitting faces of the vacuum container to be divided into half, has a labyrinth forming device inside the vacuum container in the fitting faces, and a labyrinth forming device has a concave member in which a concave portion is formed, a convex member which has a convex portion arranged to have a slight gap between the inner surface of the concave portion, and a vertically moving mechanism which operates the convex member in a direction close to the concave member.
Claims
exact text as granted — not AI-modified1 . A vacuum container which sandwiches a seal member in a fitting face of a divided portion, the vacuum container comprising:
a gas lead-out path forming device which can form a gas lead-out path which leads gas from the fitting face to an inside of the vacuum container, wherein the gas lead-out path forming device includes: a concave member in which a concave portion is formed; a convex member which includes a convex portion arranged to include a gap between an inner surface of the concave portion; and a driving device which operates one of the convex member and the concave member in a direction close to the other one of the convex member and the concave member, and wherein the gas lead-out path is formed by a gap between the convex member and the inner surface of the concave portion, and is formed only when the driving device arranges one of the convex member and the concave member close to the other one of the convex member and the concave member.
2 . The vacuum container according to claim 1 , wherein the gas lead-out path forming device does not form the gas lead-out path when an interior of the vacuum container is evacuated, and forms the gas lead-out path when the vacuum processing is performed in the vacuum container.
3 . The vacuum container according to claim 1 , wherein the gas lead-out path forming device forms the gas lead-out path in an endless shape along the fitting face.
4 . The vacuum container according to claim 1 , wherein the seal member is made of an elastomer material.Join the waitlist — get patent alerts
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