Step and Flash Imprint Lithography

Abstract

A method of forming a relief image in a structure comprising a substrate and a transfer layer formed thereon comprises covering the transfer layer with a polymerizable fluid composition, and then contacting the polymerizable fluid composition with a mold having a relief structure formed therein such that the polymerizable fluid composition fills the relief structure in the mold. The polymerizable fluid composition is subjected to conditions to polymerize polymerizable fluid composition and form a solidified polymeric material therefrom on the transfer layer. The mold is then separated from the solid polymeric material such that a replica of the relief structure in the mold is formed in the solidified polymeric material; and the transfer layer and the solidified polymeric material are subjected to an environment to selectively etch the transfer layer relative to the solidified polymeric material such that a relief image is formed in the transfer layer.

1 . A method of forming a layer on a surface, said method comprising:
 flowing a polymerizable composition between said surface and a mold in contact with said polymerizable composition by providing said polymerizable composition with a viscosity in a range 0.01 to 100 centipoise at 25° Celsius so that said polymerizable composition conforms to a shape of said mold;   solidifying said polymerizable composition, defining a solidified composition; and   increasing a distance between said solidified composition and said mold.   
     
     
         2 . The method as recited in  claim 1  wherein flowing further includes providing said polymerizable composition with a viscosity in a range of 1 to 5 centipoise, inclusive, at 25° Celsius. 
     
     
         3 . The method as recited in  claim 1  wherein flowing further includes applying said polymerizable composition to said surface and placing said mold proximate to said polymerizable fluid composition. 
     
     
         4 . The method as recited in  claim 1  wherein flowing further includes applying said polymerizable composition to said surface and pressing a side of said mold into said polymerizable fluid composition, with said side including a plurality of trenches, with solidifying further including providing said solidified material with a pattern complementary to a shape of said side. 
     
     
         5 . The method as recited in  claim 1  wherein flowing further includes applying said polymerizable composition to said surface and pressing a side of said mold into said polymerizable fluid composition, with said side including a plurality of trenches, and solidifying further includes providing said solidified material with a pattern complementary to a shape of said side and further including providing a substrate having a transfer layer disposed thereon, with said transfer layer defining said surface, and transferring said pattern into said transfer layer. 
     
     
         6 . The method as recited in  claim 5  further including transferring said pattern into said substrate. 
     
     
         7 . A method of forming a layer on a surface, said method comprising:
 placing a mold proximate to a surface with a polymerizable composition being disposed therebetween, said mold having a side with a plurality of trenches formed therein;   flowing said polymerizable composition between said surface and said mold to have said polymerizable composition fill said trenches conforming to a shape of said side by providing said polymerizable composition with a viscosity in a range 0.01 to 100 centipoise at 25° Celsius;   solidifying said polymerizable composition, defining a solidified composition having a solidified shape complementary to said shape of said side; and   increasing a distance between said solidified composition and said mold.   
     
     
         8 . The method as recited in  claim 7  wherein flowing further includes providing said polymerizable composition with a viscosity in a range of 1 to 5 centipoise, inclusive, at 25° Celsius. 
     
     
         9 . The method as recited in  claim 7  wherein flowing further includes applying said polymerizable composition to said surface and pressing said side into said polymerizable fluid composition. 
     
     
         10 . The method as recited in  claim 7  wherein flowing further includes applying said polymerizable composition to said surface and pressing said side of said mold into said polymerizable fluid composition, and further including providing a substrate having a transfer layer disposed thereon, with said transfer layer defining said surface, and transferring said pattern into said transfer layer. 
     
     
         11 . The method as recited in  claim 10  further including transferring said pattern into said substrate. 
     
     
         12 . A composition, comprising:
 a polymerizable material having a viscosity in a range of 0.01 to 100 centipoise at 25° Celsius.   
     
     
         13 . The composition as recited in  claim 12  wherein said polymerizable material has a viscosity in a range of 1 to 5 centipoise, inclusive, at 25° Celsius. 
     
     
         14 . The composition as recited in  claim 12  wherein said polymerizable material further includes organosilicons. 
     
     
         15 . The composition as recited in  claim 12  wherein said polymerizable material further includes silicon-containing material in an amount greater than about 8 to 10 percent by weight. 
     
     
         16 . The composition as recited in  claim 12  wherein said polymerizable composition further includes silicon-containing materials selected from a set of materials consisting essentially of silanes, silyl ethers, silyl esters, functionalized siloxanes, silsesquioxanes. 
     
     
         17 . The composition as recited in  claim 12  wherein said polymerizable material further includes components selected from a set consisting essentially of epoxy groups, ketene acetyl groups, acrylate groups and methacrylate groups. 
     
     
         18 . The composition as recited in  claim 12  wherein said polymerizable material further includes an initiator component to facilitate solidification of said polymerizable material in response to predetermined radiation.