Method of manufacturing ultra fine metal powder and ultra fine metal powder manufactured by the same

Abstract

Disclosed are a method of manufacturing ultra fine metal powder used for an electrode for an MLCC and ultra fine metal powder manufactured by the same. The method of manufacturing ultra fine metal powder includes: preparing a master mold in which a pattern is formed; forming a sacrificial layer by applying a polymer material on the pattern; forming a metal layer on the sacrificial layer; and forming individual ultra fine metal powder by removing the sacrificial layer and separating the metal layer from the master mold.

1 . A method of manufacturing ultra fine metal powder, comprising:
 preparing a master mold in which a pattern is formed;   forming a sacrificial layer by applying a polymer material to the pattern;   forming a metal layer on the sacrificial layer; and   forming individual ultra fine metal powder by removing the sacrificial layer and separating the metal layer from the master mold.   
     
     
         2 . The method of  claim 1 , wherein the separating includes removing the sacrificial layer by using a solvent dissolving the sacrificial layer. 
     
     
         3 . The method of  claim 2 , wherein the separating includes removing the sacrificial layer by applying ultrasonic waves to the sacrificial layer dipped in the solvent. 
     
     
         4 . The method of  claim 1 , wherein the polymer material is ethyl cellulose, polyvinyl butyral (PVB), or polyvinyl alcohol (PVA). 
     
     
         5 . The method of  claim 1 , wherein the forming of the sacrificial layer includes:
 preparing a polymer solution dissolving the polymer material; and   applying the polymer solution to the sacrificial layer.   
     
     
         6 . The method of  claim 5 , wherein the polymer material is ethyl cellulose and the polymer solution has a molecular weight of 40,000 to 200,000. 
     
     
         7 . The method of  claim 5 , wherein the polymer material is polyvinyl butyral (PVB) and the polymer solution has a molecular weight 20,000 to 40,000. 
     
     
         8 . The method of  claim 5 , wherein the applying of the polymer material is performed by a spray coating method, a transfer applying method, or a contact applying method. 
     
     
         9 . The method of  claim 1 , wherein the forming of the metal layer is performed by a sputtering method, an electroforming method, a thermal evaporation method, or an e-beam evaporation method. 
     
     
         10 . The method of  claim 1 , wherein the sacrificial layer is formed to have a thickness of 0.1 to 2 μm. 
     
     
         11 . The method of  claim 1 , wherein the sacrificial layer is formed to have a thickness of 1 to 20% with respect to a diameter of the ultra fine metal powder. 
     
     
         12 . The method of  claim 1 , wherein the fine metal powder has a ratio of a width/thickness of 10 to 200 (10:200). 
     
     
         13 . The method of  claim 1 , wherein the ultra fine metal powder is nickel (Ni) powder. 
     
     
         14 . The method of  claim 1 , wherein the pattern is formed to have a lattice shape in which protrusions and grooves are alternately disposed. 
     
     
         15 . An ultra fine metal powder manufactured by the method of manufacturing ultra fine metal powder claimed in  claim 1 .