Charge trajectory calculating method, system, and program

Abstract

In one embodiment, a charge trajectory calculating method of calculating, by simulation, trajectories of charges scattered by irradiating a target object with a charged beam includes setting a simulation region, which corresponds to an existence region of the target object, and retrieving measured data of a potential distribution which occurs in the target object by irradiating the target object with the charged beam, from a storage location at which the measured data is stored. The method further includes setting the measured data retrieved from the storage location, as the potential distribution which occurs in the simulation region by irradiating the simulation region with the charged beam, and calculating, by a Monte Carlo calculation, the trajectories of charges scattered by irradiating the simulation region by the charged beam, on an assumption that the measured data retrieved from the storage location is set as the potential distribution in the simulation region.

1 .- 15 . (canceled) 
     
     
         16 . A charge trajectory calculating method of calculating, by simulation, trajectories of charges scattered by irradiating a target object with a charged beam, the method comprising:
 setting a simulation region, which corresponds to an existence region of the target object;   retrieving measured data of a potential distribution which occurs in the target object by irradiating the target object with the charged beam, from a storage location at which the measured data is stored;   setting the measured data retrieved from the storage location, as the potential distribution which occurs in the simulation region by irradiating the simulation region with the charged beam; and   calculating, by a Monte Carlo calculation, the trajectories of charges scattered by irradiating the simulation region by the charged beam, on an assumption that the measured data retrieved from the storage location is set as the potential distribution in the simulation region.   
     
     
         17 .- 19 . (canceled) 
     
     
         20 . A computer readable record medium storing a charge trajectory calculating program for making a computer perform a charge trajectory calculating method, which calculates, by simulation, trajectories of charges scattered by irradiating a target object with a charged beam, the method comprising:
 setting a simulation region, which corresponds to an existence region of the target object;   retrieving measured data of a potential distribution which occurs in the target object by irradiating the target object with the charged beam, from a storage location at which the measured data is stored;   setting the measured data retrieved from the storage location, as the potential distribution which occurs in the simulation region by irradiating the simulation region with the charged beam; and   calculating, by a Monte Carlo calculation, the trajectories of charges scattered by irradiating the simulation region by the charged beam, on an assumption that the measured data retrieved from the storage location is set as the potential distribution in the simulation region.