Ejection nozzle arrangement having dynamic structure

Abstract

An ejection nozzle arrangement is provided having a fluid chamber, an arm extending through an aperture in the chamber, and a dynamic structure cantilevered from the chamber adjacent the aperture. The arm is connected to the dynamic structure at a point distal from the aperture such that thermal expansion of the dynamic structure moves the arm upwards in the chamber to eject fluid from the chamber.

1 . An ejection nozzle arrangement comprising:
 a fluid chamber;   an arm extending through an aperture in the chamber; and   a dynamic structure cantilevered from the chamber adjacent the aperture,   wherein the arm is connected to the dynamic structure at a point distal from the aperture such that thermal expansion of the dynamic structure moves the arm upwards in the chamber to eject fluid from the chamber.   
     
     
         2 . A nozzle arrangement as claimed in  claim 1 , in which CMOS dielectric layers are positioned about the chamber with CMOS micro-processing drive circuitry positioned on the CMOS dielectric layers. 
     
     
         3 . A nozzle arrangement as claimed in  claim 2 , in which a metal diffusion barrier is positioned in the dielectric layers. 
     
     
         4 . A nozzle arrangement as claimed in  claim 1 , in which the dynamic structure defines a movable part of the chamber connected to an ejection port. 
     
     
         5 . A nozzle arrangement as claimed in  claim 4 , in which the movable part overlaps a fixed part of the chamber. 
     
     
         6 . A nozzle arrangement as claimed in  claim 5 , in which the fixed part defines an inwardly directed lip that extends into the chamber and an outwardly directed, re-entrant portion that terminates in a radially extending rim, and the moveable part terminates at a free edge so that the re-entrant portion and the free edge define a fluidic seal in the chamber.