Capillary and ultrasonic transducer for ultrasonic bonding

Abstract

A capillary is attached to an ultrasonic transducer of a wire-bonding apparatus. The capillary includes a first part configured to be attached to the ultrasonic transducer, and a second part other than the first part and extending from the first part. The first part has a shape different from a shape of the second part so that the first part has a flexure rigidity larger than the second part.

What is claimed is: 
     
         1 . A capillary configured to be attached to an ultrasonic transducer of a wire-bonding apparatus, said capillary comprising:
 a first part configured to be attached to said ultrasonic transducer; and   a second part other than said first part and extending from said first part,   wherein said first part has a shape different from a shape of said second part so that said first part has a flexure rigidity larger than said second part.   
     
     
         2 . A capillary as claimed in  claim 1 , wherein said first part has an outer diameter larger than an outer diameter of said second part. 
     
     
         3 . A capillary as claimed in  claim 1 , wherein a through hole penetrates through said first part and said second part, and an inner diameter of said through hole in said first part is smaller than an inner diameter of said through hole in said second part. 
     
     
         4 . An ultrasonic transducer used for a wire-bonding apparatus, comprising:
 an extreme-end part configured to hold a capillary so that a longitudinal direction of said capillary is perpendicular to a longitudinal direction of said ultrasonic transducer; and   fixing concaves provided on an outer surface and arranged opposite to each other in a direction parallel to the longitudinal direction of said capillary.   
     
     
         5 . The ultrasonic transducer as claimed in  claim 4 , wherein said fixing concaves are provided at a position corresponding to a node of a longitudinal vibration generated in said ultrasonic transducer. 
     
     
         6 . A flexure vibration suppressing mechanism to suppress a flexure vibration of an ultrasonic transducer in a wire-bonding apparatus, said flexure vibration suppressing mechanism comprising:
 fixing concaves provided on an outer surface of said ultrasonic transducer and arranged opposite to each other in a direction parallel to a longitudinal direction of a capillary attached to an extreme end of said ultrasonic transducer; and   fixing pins configured to contact with said ultrasonic transducer by being inserted into said fixing concaves to press said ultrasonic transducer.   
     
     
         7 . The flexure vibration suppressing mechanism as claimed in  claim 6 , wherein said fixing concaves are provided at a position corresponding to a node of a longitudinal vibration generated in said ultrasonic transducer. 
     
     
         8 . An ultrasonic transducer used for a wire-bonding apparatus, wherein an adjustment member is attached to an extreme end of said ultrasonic transducer, the adjustment member configured to suppress a flexure vibration generated in said ultrasonic transducer. 
     
     
         9 . The ultrasonic transducer as claimed in  claim 8 , wherein said adjustment member is an elongated member extending from an extreme end of said ultrasonic transducer in a longitudinal direction of said ultrasonic transducer. 
     
     
         10 . The ultrasonic transducer as claimed in  claim 8 , wherein said adjustment member is an elongated member extending on a side opposite to a capillary attached to en extreme end of said ultrasonic transducer in a direction of a longitudinal direction of said capillary.