Method of and system for cooling a singulation process

Abstract

A system for cooling at least one singulation saw used to singulate components from a substrate. The system is comprised of a coolant loop having at one or more coolant delivery means, a coolant collection means, one or more recycle tanks for contaminate particles to settle out of the captured coolant, a mixing tank configured after the recycle tanks within the loop to produce and replace lost coolant, and a means to cool the coolant. The system can all so include filters within the loop to remove particles not removed by the settling tank. Further, the system is able to be configured with a holding tank configured to prevent any bubbles from getting to the coolant delivery means.

1 - 10 . (canceled) 
     
     
         11 . A method of generating a cooling loop for at least one singulation process comprising the steps:
 a. controlling a coolant temperature;   b. delivering the coolant to one or more singulation processes thereby generating a recycle coolant;   c. collecting the recycle coolant;   d. settling particulates from the recycle coolant; and   e. generating a mixed coolant by mixing the recycle coolant, deionized water, and a chemical.   
     
     
         12 . The method of  claim 11 , further comprising the step of filtering the recycle coolant. 
     
     
         13 . The method of  claim 12 , further comprising filtering the mixed coolant. 
     
     
         14 . The method of  claim 13 , wherein the filtering the mixed coolant is comprising a plurality of fine filter elements, wherein at least one fine filter elements is replaceable while the cooling loop is operating. 
     
     
         15 . The method of  claim 14 , wherein the filtering the recycle coolant comprises a plurality of course filter elements, wherein at least one course filter element is exchangeable while the coolant loop is operating. 
     
     
         16 . The method of  claim 15 , wherein the course filter elements are configured in a parallel format and the fine filter elements are configured in a parallel format. 
     
     
         17 . The method of  claim 16 , wherein the course filter elements are configured to remove particles 50-100 microns in their greatest dimension and the fine filter elements are configured to remove particles between 10-25 microns in their greatest dimension. 
     
     
         18 . The method of  claim 12 , further comprising the step of removing air bubbles from the coolant thereby delivering the coolant that is substantially never interrupted by an air bubble. 
     
     
         19 . The system of  claim 18 , wherein the removing of the air bubbles is provided by a holding tank greater than 1000 liters. 
     
     
         20 . The method of  claim 12 , wherein the mixing of the coolant is comprised of the steps:
 detecting a mixing tank coolant level;   controlling the flow of deionized water into the mixing tank based on the coolant level;   controlling the flow of chemical into the mixing tank based on the coolant level; and   mixing the deionized water, chemical, and recycled coolant.   
     
     
         21 . The method of  claim 11 , wherein controlling a coolant temperature comprises controlling the coolant temperature to 18-20 degrees centigrade at the step of delivering the coolant to one or more singulation processes thereby generating a recycle coolant.