US2011308614A1PendingUtilityA1

Etching composition and its use in a method of making a photovoltaic cell

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Individually held — no corporate assignee on recordPriority: Jun 16, 2010Filed: Jun 16, 2010Published: Dec 22, 2011
Est. expiryJun 16, 2030(~3.9 yrs left)· nominal 20-yr term from priority
Inventors:Angel R CartagenaFeng GaoHaixin YangLei Zhang
C09K 13/00H10F 77/211H10F 71/121H10F 71/00H10F 10/14H10F 77/315Y02E10/547Y02P70/50
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Claims

Abstract

This invention provides an etching composition comprising one or more onium salts selected from the group consisting of iodonium salts and sulfonium and an organic medium. Also provided is a method of making a photovoltaic cell that uses the etching composition to etch the anti-reflection coating and a photovoltaic cell made by this method.

Claims

exact text as granted — not AI-modified
1 . An etching composition comprising:
 a) one or more onium salts selected from the group consisting of iodonium salts and sulfonium salts; and   b) an organic medium,   
       wherein said one or more onium salts are dispersed or dissolved in said organic medium. 
     
     
         2 . The etching composition of  claim 1 , wherein said iodonium salts are diaryl iodonium salts. 
     
     
         3 . The etching composition of  claim 1 , wherein said sulfonium salts are triaryl sulfonium salts. 
     
     
         4 . The etching composition of  claim 1 , wherein said organic medium comprises carbon black powder. 
     
     
         5 . A method of making a photovoltaic cell, comprising the steps of:
 a) providing a silicon substrate with a diffusion layer on the front side of said silicon substrate and an anti-reflection coating superimposed on the surface of said diffusion layer;   b) providing an etching composition, comprising:
 i) one or more onium salts selected from the group consisting of iodonium salts and sulfonium salts; and 
 ii) an organic medium, 
   wherein said one or more onium salts are dispersed or dissolved in said organic medium;   c) depositing said etching composition onto those portions of said anti-reflection coating that are to be etched; and   d) curing said etching composition to thereby remove said portions of said anti-reflection coating to provide exposed surface of said diffusion layer to serve as the contact for a front side electrode.   
     
     
         6 . The method of  claim 5 , wherein said iodonium salts are diaryl iodonium salts and said sulfonium salts are triaryl sulfonium salts. 
     
     
         7 . The method of  claim 6 , said etching composition further comprising a photoiniator whereby said etching composition is UV curable and wherein said curing is accomplished by exposing said etching composition to UV light. 
     
     
         8 . The method of  claim 6 , wherein said curing is accomplished by exposing said etching composition to a temperature of from 300° C. to 900° C. 
     
     
         9 . The method of  claim 5 , further comprising the steps of:
 e) depositing a front side electrode-forming paste onto said exposed surface of said diffusion layer; and   f) firing said front side electrode-forming paste to form said front side electrode.   
     
     
         10 . The method of  claim 9 , wherein said iodonium salts are diaryl iodonium salts and said sulfonium salts are triaryl sulfonium salts. 
     
     
         11 . The method of  claim 10 , said etching composition further comprising a photoiniator whereby said etching composition is UV curable and wherein said curing is accomplished by exposing said etching composition to UV light. 
     
     
         12 . The method of  claim 10 , wherein said curing is accomplished by exposing said etching composition to a temperature of from 300° C. to 900° C. 
     
     
         13 . A photovoltaic cell made by the method of  claim 5 . 
     
     
         14 . A photovoltaic cell made by the method of  claim 6 . 
     
     
         15 . A photovoltaic cell made by the method of  claim 7 . 
     
     
         16 . A photovoltaic cell made by the method of  claim 8 . 
     
     
         17 . A photovoltaic cell made by the method of  claim 9 . 
     
     
         18 . A photovoltaic cell made by the method of  claim 10 . 
     
     
         19 . A photovoltaic cell made by the method of  claim 11 . 
     
     
         20 . A photovoltaic cell made by the method of  claim 12 .

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