Electron Beam Enhanced Nitriding System (EBENS)

Abstract

An electron beam enhanced nitriding system that passes a high-energy electron beam through nitrogen gas to form a low electron temperature plasma capable of delivering nitrogen ions and radicals to a substrate to be nitrided. The substrate can be mounted on an electrode, and the substrate can be biased and heated.

1 - 18 . (canceled) 
     
     
         19 . A nitriding system, comprising:
 a. a gas comprising nitrogen;   b. a cylindrical high energy electron beam source;   c. a low electron temperature cylindrical plasma, wherein the plasma is produced by the electron beam passing through the gas; and   d. a cylindrical substrate, the interior of which is to be nitrided, wherein the cylindrical substrate is co-axial with the electron beam and can be positioned at a variable distance from the electron beam;   wherein nitrogen ions and radicals diffuse outward and impact the cylindrical substrate to assist in forming a nitride layer on the interior of the cylindrical substrate.   
     
     
         20 . The system of  claim 19 , additionally comprising magnetic means for confining the electron beam to produce a geometrically well-defined, spatially uniform plasma sheet. 
     
     
         21 . The system of  claim 19 , wherein the relative position of said electron beam and substrate is adjustable. 
     
     
         22 . The system of  claim 19 , wherein said substrate is biased, heated, or both. 
     
     
         23 . The system of  claim 22 , wherein said heating may be direct, indirect, or both. 
     
     
         24 . The system of  claim 19 , wherein said substrate comprises a ferrous alloy, aluminum, an aluminum alloy, or any combination thereof.