Load port and adaptor

Abstract

A load port, which can selectively place wafer carriers differing in size on a table and can map wafers differing in size stored in the wafer carriers, and an adaptor, which can indirectly attach a wafer carrier on the table, are provided. A load port ( 100 ) includes a movable table ( 110 ) movably provided on the table ( 101 ), a module ( 161 ) for determining a carrier, and a module ( 162 ) for mapping a wafer. A wafer carrier ( 200 ) storing wafers ( 200 A) is indirectly seated on the movable table via an adaptor ( 10 ), or a wafer carrier ( 300 ) storing wafers ( 300 A) is directly seated on the movable table. The module ( 161 ) detects which of the wafer carriers is seated on the movable table and outputs a detection signal in response to the wafer carriers. The module ( 162 ) conducts mapping for the wafers, receiving the detection signal sent from the module ( 161 ).

1 . (canceled) 
     
     
         2 . A load port, which is provided in front of a door opening of a wafer treatment apparatus and on which a carrier is seated, opening and closing a load port door in the door opening, the carrier storing wafers at predetermined intervals therein, the load port comprising:
 a table;   a detecting device for identifying which of first and second carriers is seated on the table, the first carrier, storing first wafers, being seated directly on the table, and the second carrier, differing in size from the first carrier, storing second wafers differing in size from the first wafers, being seated on the table via an adaptor; and   a mapping device,   wherein the detecting device outputs a detection signal in response to one of the first and second carriers which is seated on the table, and   the mapping device conducts mapping for one of a first wafer and a second wafer, receiving the detection signal.   
     
     
         3 . A load port according to  claim 2 , wherein the mapping device changes initial values for conducting the mapping, receiving the detection signal. 
     
     
         4 . A load port according to  claim 3 , wherein the initial values comprise:
 a distance between the first wafers, and a distance between one of lowermost and uppermost holders for a first wafer in the first carrier and the table; and   a distance between the second wafers, and a distance between one of lowermost and uppermost holders for a second wafer in the second carrier and the table.   
     
     
         5 . A load port according to  claim 4 , wherein the mapping device includes a mapping sensor for detecting one of a first wafer and a second wafer, while moving in one direction selected from moving in a direction from the lowermost holder to the uppermost holder and moving in a direction from the uppermost holder to the lowermost holder. 
     
     
         6 . A load port according to  claim 5 , wherein
 when one carrier selected from the first carrier and the second carrier is seated on the table, the table moves towards the load port door such that an end portion of a first wafer stored in the first carrier and an end portion of a second wafer stored in the second carrier substantially coincide with each other,   the mapping device includes a slip-out sensor that is attached to the load port door so as to detect a first wafer and a second wafer slipping out of the holders towards the load port door, and   when the end portion lies inside a sensing area of the slip-out sensor after the table has finished moving towards the load port door, the mapping device terminates the mapping.   
     
     
         7 . A load port according to  claim 6 , wherein
 when the end portion lies outside the sensing area of the slip-out sensor after the table has finished moving towards the load port door, the mapping device starts the mapping.   
     
     
         8 . A load port according to  claim 1 , wherein
 the adaptor includes a shifting member, and   the detecting device includes:   a first sensor for detecting an amount of displacement with a bottom surface of the first carrier when the first carrier is seated on the table, and detecting an amount of displacement with a bottom surface of the adaptor when the adaptor is seated on the table; and   a second sensor that is provided on a bottom surface of the adaptor so as to detect an amount of displacement with the shifting member moving towards the table, when the second carrier is seated on the table via the adaptor.   
     
     
         9 . A load port according to  claim 8 , wherein
 the adaptor includes a thrust member on an upper surface thereof, depressed by a protrusion provided on a bottom surface of the second carrier, and   when the protrusion depresses the thrust member, the shifting member moves towards the table.   
     
     
         10 . An adaptor for a load port system, the load port system having a table on which a first carrier and a second carrier differing in size from each other are selectively seated, the first carrier, which stores first wafers, being directly seated on the table, the second carrier, which stores second wafers differing in size from the first wafers, being indirectly seated on the table, the load port system having a detecting device that outputs a detection signal indicating that the second carrier has been seated on the table, the adaptor that is provided between the second carrier and the table comprising:
 a thrust member that is provided on an upper surface of the adaptor and depressed by a protrusion provided on a bottom surface of the second carrier; and   a shifting member that is provided on a bottom surface of the adaptor, wherein   when the second carrier is indirectly seated on the table and the protrusion depresses the thrust member, the shifting member moves towards the table, and the detecting device outputs the detection signal.