Nano-Scale Coatings and Related Methods Suitable for In-Vivo Use

Abstract

A nano-scale device and method of manufacturing and use. The nano-scale device may be used in-vivo and may comprise a fluid path with an inlet microchannel, an outlet microchannel, and a nanochannel. The fluid path comprises bio-robust material. In certain embodiments, the bio-robust material may be coated over a material that is not bio-robust.

1 . A nanochannel delivery device comprising:
 an inlet microchannel;   an outlet microchannel; and   a nanochannel in fluid communication with the inlet microchannel and the outlet microchannel, wherein the inlet microchannel comprises a non-bio-robust material coated with a bio-robust material.   
     
     
         2 . The nanochannel delivery device of  claim 1  wherein the bio-robust material comprises tantalum oxide. 
     
     
         3 . The nanochannel delivery device of  claim 1  wherein the bio-robust material comprises silicon carbide. 
     
     
         4 . The nanochannel delivery device of  claim 1  wherein the non-bio-robust material comprises silicon nitride. 
     
     
         5 . The nanochannel delivery device of  claim 1  wherein the non-bio-robust material comprises silicon. 
     
     
         6 . The nanochannel delivery device of  claim 1  wherein the nanochannel is in direct fluid communication with the inlet microchannel and the outlet microchannel. 
     
     
         7 . The nanochannel delivery device of  claim 1  further comprising a macrochannel in fluid communication with the inlet microchannel, wherein the macrochannel comprises a non-bio robust material coated with a bio-robust material. 
     
     
         8 . A nanochannel delivery device comprising:
 a multi-layered structure comprising an inlet surface and an outlet surface; and   a fluid path extending from the inlet surface to the outlet surface, wherein the fluid path includes an inlet microchannel, a nanochannel, and an outlet microchannel, wherein:
 a first portion of the fluid path comprises a bio-robust material coating over a non-bio-robust material. 
   
     
     
         9 . The nanochannel delivery device of  claim 8  wherein the first portion of the fluid path comprises the inlet microchannel. 
     
     
         10 . A method of fabricating a nanochannel delivery device, the method comprising:
 forming a nanochannel delivery device comprising an inlet microchannel, an outlet microchannel, and a nanochannel, wherein:
 the nanochannel is in fluid communication with the inlet microchannel and the outlet microchannel; and 
 the nanochannel, the inlet microchannel and the outlet microchannel form a fluid path through the nanochannel delivery device; and 
   coating a first portion and the second portion of the fluid path with a bio-robust material.   
     
     
         11 . The method of  claim 10  wherein the first portion of the fluid path coated with a bio-robust material comprises the inlet microchannel. 
     
     
         12 . The method of  claim 10  wherein the second portion of the fluid path coated with a bio-robust material comprises the nanochannel. 
     
     
         13 . The method of  claim 11  wherein the bio-robust material coating of the first portion comprises tantalum oxide. 
     
     
         14 . The method of  claim 11  wherein the bio-robust material is used to coat silicon. 
     
     
         15 . The method of  claim 11  wherein the bio-robust material is used to coat polysilicon. 
     
     
         16 . The method of  claim 10  wherein the second portion of the fluid path coated with a bio-robust material comprises the outlet microchannel. 
     
     
         17 . The method of  claim 16  wherein the bio-robust material is used to coat silicon oxide. 
     
     
         18 . The method of  claim 16  wherein the bio-robust material is used to coat silicon nitride or polysilicon. 
     
     
         19 . A method of providing dimensional stability to a nano-scale device, the method comprising:
 forming the nano-scale device with a first material that is not bio-robust; and   coating the first material with a second material that is bio-robust.   
     
     
         20 . The method of  claim 19  wherein the nano-scale device comprises a nanochannel delivery device. 
     
     
         21 . A method of forming a microchannel or a macrochannel, the method comprising:
 etching a microchannel or a macrochannel in a non-bio-robust material;   coating the microchannel or a macrochannel with a bio-robust material.