Passage block and manufacturing method thereof

Abstract

A passage block formed with a passage connectable to a fluid control device comprises a first block member formed with a plurality of first-coupling-face apertures, a second block member formed with a plurality of second-coupling-face apertures in correspondence with the first-bonding-apertures, a first passage-end contact portion formed around each of the first-coupling-face apertures, a second passage-end contact portion formed around each of the second-coupling-face apertures, and a passage-end contact section provided in such a manner that a lower surface of the first block member and an upper surface of the second block member are arranged to face each other so that the first and second passage-end contact portions contact with each other, and the first and second block members are heated under pressure to diffusion-bond the first and second passage-end contact portions to each other.

1 . A method of manufacturing a passage block connectable to a fluid control device for controlling a fluid, the passage block being formed with a passage connectable to the fluid control device, the method comprising the steps of:
 arranging a first block member including a first coupling face and a plurality of first-coupling-face apertures opening in the first coupling face and a second block member including a second coupling face and a plurality of second-coupling-face apertures opening in the second coupling face in correspondence with the first-coupling-face apertures so that a first passage-end contact portion formed around each of the first-coupling-face apertures is placed in contact with a second passage-end contact portion formed around each of the second-coupling-face apertures;   pressing the first and second block members by use of a block pressure device; and   heating the first and second block members by use of a heating device to diffusion bond the first passage-end contact portion and the second passage-end contact portion to form the passage.   
     
     
         2 . The method of manufacturing the passage block, according to  claim 1 , further comprising the steps of:
 interposing a gasket between the first block member and the second block member to couple the first-coupling-face aperture and the second-coupling-face aperture; and   positioning the gasket in place by use of a gasket holding member for holding the gasket so that the gasket is diffusion-bonded to the first and second block members.