Enclosed vertical rack for storing and transporting large substrates

Abstract

An enclosed vertical rack is provided for storing and transporting large substrates. The enclosed vertical rack comprises a movable base, an enclosure on the movable base for accommodating substrates, an alignment facility in the enclosure for receiving substrates, and a sealable door for enclose the enclosure. The enclosure has a gas inlet, and the enclosure or the door has a gas outlet.

1 . An enclosed vertical rack for storing and transporting large substrates, the enclosed vertical rack comprising:
 a movable base;   an enclosure on the base for accommodating at least one of the substrates, wherein the enclosure has a gas inlet;   an alignment facility in the enclosure for receiving and slightly inclining the substrate; and   a sealable door for enclosing the enclosure, wherein the door is sized to allow the substrate to pass therethrough.   
     
     
         2 . The enclosed vertical rack in  claim 1 , wherein the gas inlet comprises a shut-off valve or is integrated in a quick-disconnect. 
     
     
         3 . The enclosed vertical rack in  claim 1 , wherein the enclosure or the door has a gas outlet. 
     
     
         4 . The enclosed vertical rack in  claim 3 , wherein the gas outlet comprises a check valve or a relief valve. 
     
     
         5 . The enclosed vertical rack in  claim 1 , wherein the movable base has a moving facility. 
     
     
         6 . The enclosed vertical rack in  claim 5 , wherein the moving facility comprises forklift slots. 
     
     
         7 . The enclosed vertical rack in  claim 5 , wherein the moving facility comprises castors. 
     
     
         8 . The enclosed vertical rack in  claim 5 , wherein the moving facility comprises rail wheels or hoisting hooks. 
     
     
         9 . The enclosed vertical rack in  claim 1 , wherein the alignment facility comprises a top comb and a bottom comb respectively disposed on the top and the bottom of the enclosure, and wherein the top comb is laterally offset from the bottom comb. 
     
     
         10 . The enclosed vertical rack in  claim 9 , wherein the alignment facility comprises rollers disposed on two sides of the projections of the top comb and the bottom combs in such a way that the rollers can roll inwardly and outwardly. 
     
     
         11 . The enclosed vertical rack in  claim 1 , further comprising a transportation restraint on the inner surface of the sealable door. 
     
     
         12 . The enclosed vertical rack in  claim 11 , wherein the transportation restraint is an elastomeric member or an inflatable member. 
     
     
         13 . The enclosed vertical rack in  claim 12 , wherein the inflatable member has a gas inlet and a gas outlet that can be accessed outside the sealable door. 
     
     
         14 . An enclosed vertical rack for storing and transporting large substrates, the enclosed vertical rack comprising:
 a movable base having a moving facility comprising forklift slots, hoisting hooks, rail wheels or castors;   an enclosure on the base for accommodating at least one of the substrates, wherein the enclosure has a gas inlet;   a top comb disposed on the top of the enclosure;   a bottom comb disposed on the bottom of the enclosure, wherein the top comb and bottom comb define a plurality of slots for receiving the substrate and the top comb is laterally offset from the bottom comb to slightly incline the substrate; and   a sealable door for enclosing the enclosure, wherein the door is sized to allow the substrate to pass therethrough.   
     
     
         15 . The enclosed vertical rack in  claim 14 , wherein the gas inlet comprises a shut-off valve or is integrated in a quick-disconnect. 
     
     
         16 . The enclosed vertical rack in  claim 14 , wherein the enclosure or the door comprises a gas outlet. 
     
     
         17 . The enclosed vertical rack in  claim 16 , wherein the gas outlet comprises a check valve or a relief valve. 
     
     
         18 . The enclosed vertical rack in  claim 14 , further comprising a transportation restraint on the inner surface of the sealable door. 
     
     
         19 . The enclosed vertical rack in  claim 14 , wherein the transportation restraint is an elastomeric member or an inflatable member. 
     
     
         20 . The enclosed vertical rack in  claim 19 , wherein the inflatable member has a gas inlet and a gas outlet that can be accessed outside the sealable door.