Plasma processing apparatus

Abstract

A plasma processing apparatus includes: a discharge state detecting unit; a history information storing portion; a date-and-time data creating portion; an object specifying data output portion; a data recording portion; and a production history file creating portion. The data recording portion reads out date-and-time data, object specifying data, machine output data representing an operation state of a plasma processing execution portion, and judgment data representing a judgment result of the discharge state, and stores the data in the history information storing portion in time series, each time the plasma processing for the object to be processed is ended. The production history file creating portion that reads out the date-and-time data, the object specifying data, the machine output data, and the judgment result of the discharge state from the history information storing portion based on a designated period or date and time, and creates a production history file.

1 . A plasma processing apparatus comprising:
 a vacuum chamber that forms a processing chamber in which an object to be processed is accommodated;   a plasma processing execution portion that introduces plasma generating gas into the processing chamber under a reduced pressure state in the processing chamber, generates a plasma discharge in the processing chamber by applying a high frequency voltage, and executes plasma processing for the object to be processed accommodated in the processing chamber;   an operating condition parameter storing portion that stores operating condition parameters set as operating conditions of the plasma processing execution portion;   an apparatus control portion that controls the plasma processing execution portion based on the operating condition parameters;   a discharge state detecting unit that detects a discharge state by analyzing a change in electric potential that corresponds to a change of plasma and judges the quality of the discharge state for each object to be processed on the basis of the detection result;   a history information storing portion;   a date-and-time data creating portion that creates date-and-time data representing date and time;   an object specifying data output portion that outputs object specifying data for specifying the object to be processed;   a data recording portion that reads out the date-and-time data, the object specifying data, machine output data representing an operation state of the plasma processing execution portion, and judgment data representing a judgment result of the discharge state performed by the discharge state detecting unit, and stores the data in the history information storing portion in time series, each time the plasma processing for the object to be processed is ended; and   a production history file creating portion that has a function of reading out the date-and-time data, the object specifying data, the machine output data, and the judgment result of the discharge state from the history information storing portion based on a designated period or date and time, and a function of creating a production history file.   
     
     
         2 . The plasma processing apparatus according to  claim 1 ,
 wherein the data recording portion further reads out the operating condition parameters and stores the read operating condition parameters in the history information storing portion in time series each time the plasma processing for the object to be processed is ended, and   wherein the production history file creating portion creates a production history file that includes the operating condition parameters.   
     
     
         3 . The plasma processing apparatus according to  claim 1 , further comprising:
 a camera that takes images of an inside of the vacuum chamber in the plasma processing,   wherein the data recording portion stores image data in the plasma processing, which are taken by the camera, in the history information storing portion in time series each time the plasma processing is ended, and   wherein the production history file creating portion creates a production history file that includes the image data.