Apparatus for predetermined component placement to a target platform

Abstract

An apparatus for placement of a component onto a target platform includes a multiple-sensor probe adapted to sense a relative position of one or more reference marks or one or more alignment marks with respect to the multiple-sensor probe. The component includes one or more alignment marks, the target platform includes one or more reference marks, and the multiple-sensor probe includes a multitude of sensors. A first multitude of latches is adapted to record a size of the reference mark, and a relative position of the reference mark with respect to the probe to facilitate alignment of the probe to the reference mark. A second multitude of latches is adapted to record an instantaneous positional relationship between the alignment mark and the aligned probe to facilitate alignment of the component to the aligned probe. The first and second multitude of latches is coupled to the multitude of sensors.

1 .- 8 . (canceled) 
     
     
         9 . An apparatus for placement of a component onto a target platform, the apparatus comprising:
 a multiple-sensor probe adapted to sense a relative position of one or more reference marks or one or more alignment marks with respect to the multiple-sensor probe wherein:
 the component includes the one or more alignment marks, 
 the target platform includes the one or more reference marks, and 
 the multiple-sensor probe includes a plurality of sensors. 
   
     
     
         10 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to:
 sense a first relative position of the multiple-sensor probe with respect to the one or more reference marks, 
 sense a second relative position of the one or more alignment marks with respect to the multiple-sensor probe, and 
 monitor an overlap status between the multiple-sensor probe and the one or more reference marks or the one or more alignment marks to align the component to the target platform. 
 
     
     
         11 . The apparatus of  claim 9  wherein one of the plurality of sensors includes a contact sensor selected from at least a resistance sensor or a current sensor. 
     
     
         12 . The apparatus of  claim 9  wherein one of the plurality of sensors includes a non-contact sensor selected from at least a capacitance sensor, an optical sensor, a photo-detector, or a photo-diode. 
     
     
         13 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to monitor whether or not the one or more alignment marks or the one or more reference marks is within sensing range of the multiple-sensor probe. 
     
     
         14 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to detect displacement between a target and a region of the multiple-sensor probe, and the target includes the one or more alignment marks or the one or more reference marks. 
     
     
         15 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to detect displacement between a center of a target and a center of the multiple-sensor probe, and the target includes the one or more alignment marks or the one or more reference marks. 
     
     
         16 . The apparatus of  claim 9  wherein the multiple-sensor probe further includes:
 a plurality of contact sensors, and 
 an anisotropic conductive elastomer laminated on a surface of the multiple-sensor contact probe. 
 
     
     
         17 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to align to the one or more reference marks and the apparatus is adapted to align the one or more alignment marks to the aligned multiple-sensor probe. 
     
     
         18 . The apparatus of  claim 9  wherein the target platform includes a plurality of reference marks, and the multiple-sensor probe is further adapted to sense the plurality of reference marks and to detect orientation error between the target platform and the multiple-sensor probe. 
     
     
         19 . The apparatus of  claim 9  wherein the component includes a plurality of alignment marks, and the multiple-sensor probe is further adapted to sense the plurality of alignment marks and to detect orientation error between the component and the multiple-sensor probe. 
     
     
         20 . The apparatus of  claim 9  wherein the multiple-sensor probe is further adapted to provide feedback to the apparatus for component position adjustment. 
     
     
         21 . The apparatus of  claim 9  wherein the component further includes a contact pitch smaller than 0.5 mm. 
     
     
         22 . The apparatus of  claim 9  wherein the component further includes greater than two-hundred contacts. 
     
     
         23 . The apparatus of  claim 9  wherein the component is a bare-die integrated circuit or a stack of bare die integrated circuits. 
     
     
         24 . The apparatus of  claim 9  wherein the target platform is a bare-die integrated circuit or a stack of bare die integrated circuit. 
     
     
         25 . The apparatus of  claim 9  wherein the one or more alignment marks are adapted to have a predetermined spatial relationship to a contact array on the component. 
     
     
         26 . The apparatus of  claim 9  wherein the one or more reference marks are adapted to have a predetermined spatial relationship to a contact land pattern on the target platform. 
     
     
         27 . An apparatus for placement of a component onto a target platform, the apparatus comprising:
 a multiple-sensor probe including a plurality of sensors;   a first plurality of latches adapted to record:
 a size of a reference mark on the target platform, and 
 a relative position of the reference mark with respect to the multiple-sensor probe to facilitate alignment of the multiple-sensor probe to the reference mark, wherein the first plurality of latches is coupled to the plurality of sensors; and 
   a second plurality of latches adapted to record:
 an instantaneous positional relationship between an alignment mark on the component and the aligned multiple-sensor probe to facilitate alignment of the component to the aligned multiple-sensor probe, wherein the second plurality of latches is coupled to the plurality of sensors. 
   
     
     
         28 . The apparatus of  claim 27 , wherein the multiple-sensor probe is adapted to decouple the alignment of the component to the target platform from an imperfection in an outline of a component package, a cut of a die, or an imperfection in the target substrate. 
     
     
         29 . The apparatus of  claim 27  wherein the multiple-sensor probe further includes an anisotropic conductive elastomer laminated on a surface of the multiple-sensor probe. 
     
     
         30 . The apparatus of  claim 27  wherein:
 the first plurality of latches is further adapted to record the size and relative position of the reference mark with respect to the multiple-sensor probe in a subset of the first plurality of latches, 
 the second plurality of latches is further adapted to record the instantaneous positional relationship between the alignment mark and the multiple-sensor probe in a subset of the second plurality of latches, and 
 the apparatus is adapted to determine an achieved alignment responsive to a predetermined relationship between the subset of the first plurality of latches and the subset of the second plurality of latches. 
 
     
     
         31 . The apparatus of  claim 27  wherein the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors, wherein the array of test points is arranged in regular configuration. 
     
     
         32 . The apparatus of  claim 27  wherein the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors, wherein the array of test points is arranged in irregular configuration. 
     
     
         33 . The apparatus of  claim 30  wherein:
 the multiple-sensor probe further includes an array of test points corresponding to the plurality of sensors, 
 the subset of the first plurality of latches corresponds to the size of the reference mark, 
 the subset of the second plurality of latches corresponds to an overlap between the alignment mark and the reference mark, and 
 the apparatus is further adapted to determine an achieved alignment if the subset of the first plurality of latches and the subset of the second plurality of latches record the alignment mark and the reference mark have a common center. 
 
     
     
         34 . An apparatus for placement of a component onto a target platform, the apparatus comprising:
 a capacitance probe adapted to sense a relative position of one or more reference marks or one or more alignment marks with respect to the capacitance probe wherein:
 the component includes the one or more alignment marks, 
 the target platform includes the one or more reference marks, 
 the capacitance probe includes a plurality of capacitance sensors, 
 the capacitance probe is adapted to align to the one or more reference marks, and 
 the apparatus is adapted to align the one or more alignment marks to the aligned capacitance probe.