Container containing a cobalt carbonyl complex and cobalt carbonyl complex composition

Abstract

A container containing a cobalt carbonyl complex and a gas that contains carbon monoxide, and a cobalt carbonyl complex composition comprising a cobalt carbonyl complex and a solvent, wherein the concentration of carbon monoxide dissolved in the solvent is 0.001 to 1 wt %. Since the cobalt carbonyl complex contained in the above container or the above composition can retain its sublimation properties for a long time without being converted into a stable complex, when a cobalt film is formed by chemical vapor deposition using the container and the composition, a high-quality film can be formed by a simple process, and the production cost of the cobalt film can be reduced due to high use efficiency of the precursor.

1 . A container comprising a cobalt carbonyl complex and a gas, wherein
 the gas comprises carbon monoxide, and   the cobalt carbonyl complex is sublimated to form a cobalt film on a substrate, and the container is used to carry out the sublimation of the cobalt carbonyl complex therefrom.   
     
     
         2 . The container according to  claim 1 , wherein
 the concentration of carbon monoxide in the gas is not less than 10 vol %.   
     
     
         3 . The container according to  claim 1 , wherein
 the cobalt carbonyl complex is represented by any one of the following formulas (1) to (4):
   CO 2 (CO) 8   (1)
 
   CO 3 (CO) 9 CZ  (2)
 
   
       wherein Z is a hydrogen atom, halogen atom, methyl group, methoxy group or trifluoromethyl group
   CO 3 (CO) 12   (3)
 
   CO 4 (CO) 12   (4).
 
 
     
     
         4 . (canceled) 
     
     
         5 . The container according to  claim 1 , wherein
 the container has a container body and a gas introduction port and a gas exhaust port formed in the container body.   
     
     
         6 . The container according to  claim 4 , wherein
 the container has at least partitions or a filler therein.   
     
     
         7 . A method of forming a cobalt film, comprising:
 heating the container of  claim 1  to sublimate the cobalt carbon complex from the container and supply it onto a substrate; and   converting the cobalt carbonyl complex into cobalt on the substrate.   
     
     
         8 . A composition comprising a cobalt carbonyl complex and a solvent, wherein
 the concentration of carbon monoxide dissolved in the solvent is 0.001 to 1 wt %.   
     
     
         9 . The composition according to  claim 8 , wherein
 the cobalt carbonyl complex is represented by any one of the following formulas (1) to (4):
   CO 2 (CO) 8   (1)
 
   CO 3 (CO) 9 CZ  (2)
 
   
       wherein Z is a hydrogen atom, halogen atom, methyl group, methoxy group or trifluoromethyl group
   CO 3 (CO) 12   (3)
 
   CO 4 (CO) 12   (4).
 
 
     
     
         10 . The composition according to  claim 1 , wherein
 the solvent is at least one selected from the group consisting of an aliphatic hydrocarbon, alicyclic hydrocarbon, aromatic hydrocarbon, alcohol, ether, ketone and halogenated hydrocarbon.   
     
     
         11 . A method of forming a cobalt film, comprising:
 sublimating a cobalt carbonyl complex derived from the composition of  claim 8  to supply it onto a substrate; and   converting the cobalt carbonyl complex into cobalt on the substrate.   
     
     
         12 . The method of forming a cobalt film according to  claim 11 , comprising:
 placing the composition on another substrate different from a substrate on which a cobalt film is to be formed; and   sublimating the cobalt carbonyl complex while the surface on which the cobalt film is to be formed of the substrate and the surface having the cobalt carbonyl complex composition of the other substrate are opposed to each other.   
     
     
         13 - 14 . (canceled)