Label sheet for cleaning and conveying member having cleaning function

Abstract

A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

1 . A conveying member comprising:
 a conveyor member substrate shaped to be conveyable into and by an apparatus to be cleaned; and   a label on the conveyor member substrate,   wherein the label is less wide than a surface of the conveying member substrate and does not protrude from edges of the surface of the conveying member substrate.   
     
     
         2 . A conveying member according to  claim 1 , wherein the label comprises a laminate of a cured cleaning layer and an adhesive layer with a base material arranged therebetween. 
     
     
         3 . A conveying member according to  claim 2 , wherein the cured cleaning layer has a 180° peeling adhesion to a mirror surface of a silicon wafer of 0.20 N/10 mm or less. 
     
     
         4 . A conveying member according to  claim 2 , wherein the cured cleaning layer has a modulus of tensile elasticity of 10 N/mm 2  or more in accordance with JIS K7127. 
     
     
         5 . A conveying member according to  claim 1 , wherein an outer surface of the cured cleaning layer is protected by a removable protective film. 
     
     
         6 . A conveying member according to  claim 1 , wherein the cured cleaning layer comprises a curing-type adhesive which has been polymerized and cured by receipt of an active energy. 
     
     
         7 . A conveying member for cleaning according to  claim 6 , wherein the active energy is ultraviolet energy.