Optical sensor element for a measuring machine, and coupling element therefor on the measuring machine side

Abstract

The invention relates to an optical sensor element for a measuring machine, comprising a coupling element on the sensor element side for mechanically and optically connecting to a coupling element on the measuring machine side. An optical fiber is arranged in the coupling element on the sensor element side, wherein said optical fiber comprises an optical interface for connecting to an optical machine contact element of the measuring machine, wherein said optical interface is formed by an optical sensor contact element having a self-centering ferrule that encloses the end of the optical fiber. The ferrule is supported in the coupling element on the sensor element side in a floating manner.

1 .- 15 . (canceled) 
     
     
         16 . An optical sensor element for a measuring machine, comprising:
 a coupling element on the sensor element side for mechanical and optical connection to a coupling element on the measuring machine side; and   an optical fiber for measuring signal transmission in the coupling element on the sensor element side that has an optical interface for connection to an optical machine contact element of the measuring machine which optical interface is formed by an optical sensor contact element having a self-centering ferrule surrounding the end of the optical fiber, the ferrule being supported in a floating fashion in the coupling element on the sensor element side.   
     
     
         17 . The sensor element as claimed in  claim 16 , wherein the ferrule has a chamfer for self-centering during a connecting operation with the coupling element on the measuring machine side. 
     
     
         18 . The sensor element as claimed in  claim 16 , wherein the sensor contact element is formed with a ground bevel. 
     
     
         19 . The sensor element as claimed in  claim 18 , wherein the sensor contact element has a beam cross section enlarged by comparison with the core of the optical fiber. 
     
     
         20 . The sensor element as claimed in  claim 18 , wherein the sensor contact element has a beam cross section enlarged by comparison with the core of the optical fiber, the beam cross section being enlarged at least by a factor of 5, 10, 20 or 50 by comparison with the core of the optical fiber. 
     
     
         21 . The sensor element as claimed in  claim 18 , wherein the sensor contact element is a lens, a gradient index lens, or in the form of a fiber. 
     
     
         22 . The sensor element as claimed in  claim 18 , wherein the optical fiber is a single mode fiber. 
     
     
         23 . The sensor element as claimed in  claim 16 , wherein the ferrule terminates flush with the sensor contact element. 
     
     
         24 . The sensor element as claimed in  claim 16 , wherein the ferrule has on a peripheral side an orientation surface for holding the ferrule in a defined fashion in an assigned orientation. 
     
     
         25 . The sensor element as claimed in  claim 16 , wherein a spring is applied to the ferrule in order to produce a contact pressure at the optical interface. 
     
     
         26 . A coupling element on the measuring machine side for a measuring machine for connection to a sensor element as claimed in  claim 16 , wherein the coupling element on the measuring machine side has an optical machine contact element for connection to an optical sensor contact element of the sensor element for the purpose of measuring signal transmission. 
     
     
         27 . The coupling element as claimed in  claim 26 , wherein the machine contact element has an optical fiber with a ferrule and a guide sleeve for self-centering of the ferrules of the sensor contact element and machine contact element, the ferrule and guide sleeve being supported in a floating fashion in the coupling element. 
     
     
         28 . The coupling element as claimed in  claim 27 , wherein the ferrule and/or the guide sleeve have/has a chamfer for self-centering during a connecting operation with the sensor element. 
     
     
         29 . The coupling element as claimed in  claim 27 , wherein the optical fiber is held at one end in the ferrule and surrounded by the guide sleeve, the guide sleeve projecting in an axial direction beyond the ferrule and preferably being provided at its free end with a chamfer on the inner surface. 
     
     
         30 . The coupling element as claimed in  claim 27 , wherein the machine contact element is formed with a ground bevel and has a beam cross section that is enlarged by comparison with the core of the optical fiber. 
     
     
         31 . The coupling element as claimed in  claim 27 , wherein an inner surface of the guide sleeve has a roundness with a radial deviation that is smaller than the core diameter of the fiber used. 
     
     
         32 . The coupling element as claimed in  claim 27 , wherein an inner surface of the guide sleeve has a roundness with a radial deviation that is smaller than the core diameter of the fiber used and is at most 2 μm. 
     
     
         33 . The sensor element as claimed in  claim 16 , wherein a spring is applied in an axial direction of the optical fiber to the ferrule in order to produce a contact pressure at the optical interface. 
     
     
         34 . A coupling element on the measuring machine side for a coordinate measuring machine for connection to a sensor element as claimed in  claim 16 , wherein the coupling element on the measuring machine side has an optical machine contact element for connection to an optical sensor contact element of the sensor element for the purpose of measuring signal transmission for interferometric measurement methods. 
     
     
         35 . An optical sensor element for a coordinate measuring machine, comprising:
 a coupling element on the sensor element side for mechanical and optical connection to a coupling element on the measuring machine side; and   an optical fiber for measuring signal transmission in the coupling element on the sensor element side that has an optical interface for connection to an optical machine contact element of the measuring machine for interferometric measurement methods, which optical interface is formed by an optical sensor contact element having a self-centering ferrule surrounding the end of the optical fiber, the ferrule being supported in a floating fashion in the coupling element on the sensor element side.