Optical filter and analytical instrument

Abstract

An optical filter includes: a lower substrate; a lower mirror provided to the lower substrate; a lower electrode provided to the lower substrate; an upper substrate disposed so as to be opposed to the lower electrode; an upper mirror provided to the upper substrate, and opposed to the lower mirror; and an upper electrode provided to the upper substrate, and opposed to the lower electrode, wherein the upper substrate has a groove surrounding the upper mirror in a plan view, the groove includes a first side surface section, a second side surface section, a bottom surface section, a first end section located between the first side surface section and the bottom surface section, and a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and the first end section and the second end section each have a curved surface.

1 . An optical filter comprising:
 a lower substrate;   a lower mirror provided to the lower substrate;   a lower electrode provided to the lower substrate;   an upper substrate disposed so as to be opposed to the lower substrate;   an upper mirror provided to the upper substrate, and opposed to the lower mirror; and   an upper electrode provided to the upper substrate, and opposed to the lower electrode,   wherein the upper substrate has a groove surrounding the upper mirror in a plan view,   the groove includes
 a first side surface section, 
 a second side surface section, 
 a bottom surface section, 
 a first end section located between the first side surface section and the bottom surface section, and 
 a second end section located between the second side surface section and the bottom surface section, in a cross-sectional view, and 
   the first end section and the second end section each have a curved surface.   
     
     
         2 . The optical filter according to  claim 1 , wherein
 the bottom surface section is flat, and   the upper electrode is disposed on the upper substrate within a region located under the bottom surface section in the plan view.   
     
     
         3 . The optical filter according to  claim 1 , wherein
 the first end section is located nearer to the upper mirror, and   the first end section fails to overlap the upper mirror in the plan view.   
     
     
         4 . The optical filter according to  claim 1 , wherein
 the lower substrate and the upper substrate each have a light transmissive property.   
     
     
         5 . The optical filter according to  claim 1 , wherein
 the groove is formed by performing a wet-etching process after performing a dry-etching process.   
     
     
         6 . An analytical instrument comprising the optical filter according to  claim 1 . 
     
     
         7 . An analytical instrument comprising the optical filter according to  claim 2 . 
     
     
         8 . An analytical instrument comprising the optical filter according to  claim 3 . 
     
     
         9 . An analytical instrument comprising the optical filter according to  claim 4 . 
     
     
         10 . An analytical instrument comprising the optical filter according to  claim 5 .