Combinatorial Processing Including Stirring

Abstract

Combinatorial processing including stirring is described, including defining multiple regions of a substrate, processing the multiple regions of the substrate in a combinatorial manner, introducing a fluid into a first aperture at a first end of a body to dispense the fluid out of a second aperture at a second end of the body and into one of the multiple regions, and agitating the fluid using an impeller at a second end of the body to facilitate interaction of the fluid with a surface of the substrate.

1 . A method comprising:
 defining multiple regions of a substrate;   processing the multiple regions of the substrate in a combinatorial manner;   introducing a fluid into a first aperture at a first end of a body to dispense the fluid out of a second aperture at a second end of the body and into one of the multiple regions; and   agitating the fluid using an impeller at a second end of the body to facilitate interaction of the fluid with a surface of the substrate.   
     
     
         2 . The method of  claim 1 , wherein agitating the fluid comprises agitating the fluid to alter a flow of the fluid and to mimic a spin processor. 
     
     
         3 . The method of  claim 1 , further comprising:
 determining an efficacy of the introducing and the agitating; and   determining techniques to process another substrate based on the introducing and the agitating.   
     
     
         4 . The method of  claim 1 , further comprising:
 wherein introducing the fluid comprises introducing the fluid continuously for a predetermined amount of time; and   removing the fluid from the substrate.   
     
     
         5 . The method of  claim 4 , wherein introducing the fluid comprises causing a choked flow through the second aperture. 
     
     
         6 . The method of  claim 1 , wherein introducing the fluid comprises introducing a predetermined amount of fluid into the first aperture. 
     
     
         7 . The method of  claim 1 , wherein introducing the fluid comprises performing one of a clean operation and a deposition. 
     
     
         8 . The method of  claim 1 , wherein agitating the fluid comprises rotating the body. 
     
     
         9 . The method of  claim 1 , further comprising adjusting a height of the impeller relative to the substrate. 
     
     
         10 . The method of  claim 3 , further comprising:
 forming at least a portion of at least one structure on each of the multiple regions; and   wherein determining the efficacy evaluates characteristics of the at least one structure.   
     
     
         11 . A method, comprising:
 defining multiple regions of a first substrate;   processing the multiple regions of the substrate in a combinatorial manner;   introducing a first fluid into a first aperture at a first end of a body to dispense the first fluid out of a second aperture at a second end of the body into one of the multiple regions;   agitating the first fluid using an impeller at the second end of the body to alter a flow of the fluid and to mimic a spin processor; and   determining techniques for processing a second substrate based on parameters of the introducing and the agitating.   
     
     
         12 . The method of  claim 11 , wherein the techniques for processing the second substrate comprise spinning a second fluid compositionally similar to the first fluid onto substantially an entire surface of the second substrate. 
     
     
         13 . The method of  claim 11 , further comprising rotating the body in a sleeve comprising a baffle configured to alter flow characteristics of the first fluid. 
     
     
         14 . The method of  claim 13 , further comprising varying a speed of the rotating to alter the flow characteristics. 
     
     
         15 . The method of  claim 11 , wherein introducing the first fluid comprises:
 introducing the first fluid continuously for a predetermined amount of time to cause a choked flow through the second aperture; and   removing the first fluid from the substrate.   
     
     
         16 . The method of  claim 11 , wherein introducing the first fluid comprises introducing a predetermined amount of the first fluid into the first aperture.