Multi-Layer Three-Dimensional Structures Having Features Smaller Than a Minimum Feature Size Associated With the Formation of Individual Layers

Abstract

Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.

1 . A layered three-dimensional structure having a minimum feature size associated with the formation of each layer, the layered three-dimensional structure comprising:
 a first element, comprising at least one first material region and at least one first void in the first material region; and   a second element, comprising at least one second material region and at least one second void in the second material region and which at least one second material region is positioned adjacent to and adhered to any overlapping portions of the at least one first material region, to define a third element comprising the at least one first void and the at least one second void,   wherein the third element has one or more individual openings sized less than the minimum feature size,   wherein the first element comprises a structure formed from multiple layers,   wherein the second element comprises a structure formed from multiple layers,   wherein individual layers of the at least one first material region of the first element are adhered to overlapping portions of adjacent individual layers of the at least one first material region. and   wherein individual layers of the at least one second material region of the second element are adhered to overlapping portions adjacent individual layer of the layer one second material region.   
     
     
         2 . The layered three-dimensional structure of  claim 1 , wherein the structure comprises a filter and wherein the third element comprises one or more pores of the filter. 
     
     
         3 . A layered three-dimensional structure formed from a process having a minimum feature size associated with the formation of features on each layer, the layered three-dimensional structure comprising:
 a first layer defining a first opening, wherein the first opening is at least as large as the minimum feature size; and   a second layer positioned adjacent to the first layer, wherein the second layer defines a second opening at least as large as the minimum feature size, wherein the second opening is positioned adjacent the first opening to define a third opening at the junction of the first opening and the second opening, and wherein the third opening has an effective size that is at least in part less than the minimum feature size, and wherein portions of the second layer overlying portions of the first layer are adhered to one another and wherein at least a portion of the second opening overlies at least a portion of the first opening.   
     
     
         4 . The layered three-dimensional structure of  claim 3 , wherein the first layer comprises a material selected from the group consisting of gold, silver, nickel, and copper. 
     
     
         5 . The layered three-dimensional structure of  claim 4 , wherein the first layer comprises nickel. 
     
     
         6 . The layered three-dimensional structure of  claim 4 , wherein the second layer comprises a material selected from the group consisting of gold, silver, nickel, and copper. 
     
     
         7 . The layered three-dimensional structure of  claim 5 , wherein the second layer comprises nickel. 
     
     
         8 . The layered three-dimensional structure of  claim 3 , wherein the first layer has a thickness between 1 μm and 20 μm, and wherein the second layer has a thickness between 1 μm and 20 μm. 
     
     
         9 . The layered three-dimensional structure of  claim 8 , wherein the first layer is about 2 μm thick, and wherein the second layer is about 2 μm thick. 
     
     
         10 . The layered three-dimensional structure of  claim 3 , wherein the first layer is oriented substantially along a first plane, wherein the second layer is oriented substantially along a second plane, and wherein the first plane is substantially parallel to the second plane. 
     
     
         11 . A layered three-dimensional structure having a minimum feature size associated with the formation of features on each layer, the layered three-dimensional structure comprising:
 a first layer having a frame structure defining an array of first openings, wherein each first opening is at least as large as the minimum feature size; and   a second layer having a frame structure defining an array of second openings, wherein each second opening is at least as large as the minimum feature size, wherein the second layer is positioned adjacent to and adhered to the first layer, wherein at least some openings in the array of second openings are positioned to partially overlap at least some openings in the array of first openings to define an array of third openings formed from array of first openings and the array of second openings, and wherein at least a portion of the openings in the third array of openings have an effective width that is less than the minimum feature size.   
     
     
         12 . The layered three-dimensional structure of  claim 11  wherein the three-dimensional structure comprises a filter having an effective pore size less than the minimum feature size. 
     
     
         13 . The layered three-dimensional structure of  claim 12 , wherein the third openings comprise pores in the filter. 
     
     
         14 . The layered three-dimensional structure of  claim 11 , wherein the first layer comprises a material selected from the group consisting of gold, silver, nickel, and copper. 
     
     
         15 . The layered three-dimensional structure of  claim 11 , wherein the first layer comprises nickel. 
     
     
         16 . The layered three-dimensional structure of  claim 14 , wherein the second layer comprises a material selected from the group consisting of gold, silver, nickel, and copper. 
     
     
         17 . The layered three-dimensional structure of  claim 16 , wherein the second layer comprises nickel. 
     
     
         18 . The layered three-dimensional structure of  claim 11  wherein the first layer has a thickness between 1 μm and 20 μm, and wherein the second layer has a thickness between 1 μm and 20 μm. 
     
     
         19 . The layered three-dimensional structure of  claim 18 , wherein the first layer is about 2 μm thick, and wherein the second layer is about 2 μm thick.