Method and Apparatus for Controlling Film Deposition

Abstract

The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.

1 . A method for providing accurate deposition of ink on a substrate, the method comprising:
 providing a quantity of ink to a chamber, the ink having a plurality of suspended particles in a carrier liquid;   metering at least a portion of the ink delivered from the chamber to an inlet of a discharge nozzle by activating a dispenser;   receiving the metered ink at a discharge nozzle, the discharge nozzle having an inlet port and an outlet port;   transporting the metered ink from the inlet port to the outlet port of the discharge nozzle forming substantially solid particles; and   depositing the substantially solid particles from the outlet port of the discharge nozzle onto a substrate by energizing the discharge nozzle to pulsatingly eject at least a portion of the substantially solid particles onto the substrate.   
     
     
         2 . The method of  claim 1 , wherein the step of metering at least a portion of the ink further comprises providing a plurality of energy pulses to the dispenser, each energy pulse defined by at least one of an amplitude of the pulse, a duration of the pulse, or a frequency of the pulse. 
     
     
         3 . The method of  claim 1 , wherein the step of metering at least a portion of the ink further comprises providing a plurality of energy pulses to a piezoelectric element associated with the chamber, each energy pulse defined by at least one of amount or duration. 
     
     
         4 . The method of  claim 1 , wherein the inlet port and the outlet port are separated by a plurality of conduits. 
     
     
         5 . The method of  claim 1 , wherein the inlet port and the outlet port are separated by a porous material. 
     
     
         6 . The method of  claim 1 , wherein the inlet port and the outlet port are separated by a plurality of conduits having a tortuous path. 
     
     
         7 . The method of  claim 1 , wherein the inlet port and the outlet port are substantially the same. 
     
     
         8 . The method of  claim 1 , further comprising simultaneously evaporating the carrier liquid and transporting the metered ink from the inlet port to the outlet port of the discharge nozzle.