Method of making a transducer with a conductive magnetic layer

Abstract

A transducer includes a first layer that is selectively deposited in a contact region to form a core, and selectively deposited in a transducer region to form a first element of the transducer. The transducer includes an electrically conductive magnetic deposit. The electrically conductive magnetic deposit forms a sidewall on the core. The electrically conductive magnetic deposit forms a second element of the transducer in the transducer region. The second element of the transducer has a planarized surface that is coplanar with a planarized surface of the sidewall.

1 . A process, comprising:
 depositing a first layer to form a support core in a contact region, the support core being electrically insulating and having an outwardly facing support core sidewall that extends to a support core top surface; and to form a first element of a transducer in a transducer region, the first element being non-contiguous with the support core;   depositing an electrically conductive magnetic layer to form a first magnetic deposit portion that surrounds the support core sidewall and that extends over the support core top surface; and to form a second element of the transducer in the transducer region; and   planarizing the first magnetic deposit portion and the second element of the transducer.   
     
     
         2 . The process of  claim 1 , and the first magnetic deposit portion protruding to a level that is substantially the same as a level of protruding of the second element of the transducer after the planarizing. 
     
     
         3 . The process of  claim 1 , wherein the planarizing forms mutually coplanar surfaces on the support core sidewall and the second element. 
     
     
         4 . The process of  claim 1 , wherein the planarizing comprises chemical mechanical polishing. 
     
     
         5 . The process of  claim 1 , further comprising: forming the first layer from a material selected from the group of: silicon carbide, alumina, silicon dioxide, silicon nitride. 
     
     
         6 . The process of  claim 1 , further comprising: depositing an electrically insulating backfill layer in a space between the support core sidewall and the second element of the transducer. 
     
     
         7 . The process of  claim 1 , wherein the depositing of the electrically conductive magnetic layer further forms a cap on the support core top surface. 
     
     
         8 . A method, comprising:
 conducting a transducer signal to a contact portion of a conductive layer in a laminated magnetic transducer that has a transducer region and a contact region;   depositing a first layer in the contact region that forms a support core, and depositing the first layer in the transducer region that forms a first element of a transducer;   depositing a conductive magnetic layer that conducts the transducer signal from the contact portion to a distal end of the support core, the electrically conductive magnetic layer forming a second element of the transducer in the transducer region; and   planarizing the electrically conductive magnetic layer.   
     
     
         9 . The method of  claim 8 , and the conductive magnetic layer conducting the transducer signal to an external contact pad in the contact region. 
     
     
         10 . The method of  claim 8 , and a magnetoresistive element of the transducer generating the transducer signal. 
     
     
         11 . The method of  claim 8 , and conducting the transducer signal to a write transducer. 
     
     
         12 . The method of  claim 8 , and depositing a seed layer prior to depositing the conductive magnetic layer. 
     
     
         13 . A process, comprising:
 depositing a first layer that forms a cylindrical support core in a contact region of a transducer, the support core being electrically insulating and having an outwardly facing support core sidewall that extends to a support core top surface; and that forms a first element of a transducer, the first element being non-contiguous with the support core;   depositing an electrically conductive magnetic layer that forms a first magnetic deposit portion that surrounds the support core sidewall and that extends over the support core top surface; and that forms a second element of the transducer on the first element; and   planarizing the first magnetic deposit portion and the second element of the transducer.   
     
     
         14 . The method of  claim 13 , wherein the depositing of the electrically conductive magnetic layer comprises depositing through openings in a mask. 
     
     
         15 . The method of  claim 14 , wherein the mask is patterned using a lithographic technique. 
     
     
         16 . The method of  claim 13 , wherein the depositing of the electrically conductive magnetic layer comprises plating. 
     
     
         17 . The method of  claim 16 , wherein the plating comprises depositing a seed layer. 
     
     
         18 . The method of  claim 13 , and further comprising application of a backfill layer before the planarizing. 
     
     
         19 . The method of  claim 18 , wherein the backfill layer comprises electrically insulating material. 
     
     
         20 . The method of  claim 13 , wherein the first magnetic deposit and the second element are planarized simultaneously.