Segmented contactor

Abstract

A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.

1 - 86 . (canceled) 
     
     
         87 . A segmented contactor assembly comprising:
 a backing substrate comprising a surface; and   contactor units each comprising electrically conductive resilient contact elements extending from a first side of said contactor unit and having contact tips disposed in a sub-pattern, wherein second sides opposite said first sides of said contactor units are coupled to said surface of said backing substrate in particular positions such that said sub-patterns of said contact tips form an overall pattern that corresponds to terminals of integrated circuits to be contacted by said contact tips.   
     
     
         88 . The segmented contactor assembly of  claim 87 , wherein said backing substrate comprises alignment structures that define said particular positions. 
     
     
         89 . The segmented contactor assembly of  claim 88 , wherein said alignment structures extend from said surface and are disposed between adjacent ones of said contactor units. 
     
     
         90 . The segmented contactor assembly of  claim 87  further comprising adhesive material disposed between and adhering said second sides of said contactor units to said surface of said backing substrate. 
     
     
         91 . The segmented contactor assembly of  claim 87  further comprising electrical connectors coupled to said first sides of said contactor units. 
     
     
         92 . The segmented contactor assembly of  claim 91 , wherein each of said segmented contactor units comprises electrical connections between said electrical connector coupled to said first side of said contactor unit and said contact elements extending from said first side of said contactor unit. 
     
     
         93 . The segmented contactor assembly of  claim 92 , wherein said electrical connectors are flex strip connectors. 
     
     
         94 . The segmented contactor assembly of  claim 87  further comprising electrical connections electrically connecting adjacent ones of said contactor units. 
     
     
         95 . The segmented contactor assembly of  claim 94 , wherein said electrical connections comprise flex strip connections. 
     
     
         96 . The segmented contactor assembly of  claim 94 , wherein said electrical connections comprise wires bonded to terminals on said first sides of said adjacent contactor units.