US2011171392A1PendingUtilityA1
System and Method for Manufacturing Embedded Conformal Electronics
Est. expiryAug 5, 2022(expired)· nominal 20-yr term from priority
H10W 20/031H10W 20/068B23K 26/361H05K 3/04H05K 3/14C23C 4/18H05K 3/027H05K 3/043C23C 4/185G03F 7/70383B23K 26/0093B23K 2101/36H05K 2203/1344H10N 10/01H10N 10/17
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Claims
Abstract
A method for fabricating an electronic device comprises providing a substrate, direct writing a functional material by a thermal spray on the substrate and removing a portion of the function material to form the electronic or sensory device.
Claims
exact text as granted — not AI-modified1 . A method for fabricating an electronic device, comprising:
providing a substrate; depositing a functional material by a thermal spray on the substrate; and removing a portion of the functional material to form the electronic or sensory device.
2 . The method of claim 1 , wherein the substrate is flexible.
3 . The method of claim 1 , wherein depositing is a direct writing.
4 . The method of claim 1 , wherein depositing a functional material further comprises heat treating the functional material.
5 . The method of claim 1 , wherein the heat treating is preformed one of before or after removing a portion of the functional material.
6 . The method of claim 1 , wherein depositing further comprises forming a conformal layer on the substrate.
7 . The method of claim 1 , wherein depositing the functional material further comprises providing one of a metal, a semiconductor, a ceramic, and a polymer in the thermal spray.
8 . The method of claim 1 , wherein depositing the functional material further comprises providing one of a dielectric material and an insulating material.
9 . The method of claim 1 , wherein removing the portion of the functional material further comprises providing a focused laser beam to the functional material.
10 . The method of claim 1 , wherein the electronic device is fabricated in-situ.
11 . The method of claim 1 , further comprising coating a portion of the electronic device.
12 . The method of claim 1 , further comprising:
depositing an insulating layer over the functional material after removing the portion, wherein the functional material is a bottom metal comprising at least two parallel strips, wherein a portion of each of the two parallel strips is exposed on each of at least two sides of the insulating layer; depositing a top metal of functional material by the thermal spray over the insulating layer and exposed portions of the two parallel strips; and removing a portion of the top metal of functional material, forming at least one strip, the at least one strip connecting a portion of one of the two parallel strips exposed on a first side of the insulating layer and a portion of a second strip of the two parallel strips exposed on a second side of the insulting layer.
13 . A system for fabricating an electronic device comprising:
a thermal spray device for depositing a conformal layer of a functional material; and a material removal device for fabricating an electronic device from the conformal layer of the functional material.
14 . The system of claim 13 , further comprising a fixture for retaining a substrate upon which the conformal layer of the functional material is deposited.
15 . The system of claim 13 , wherein the material removal device comprises a programmable motion device.
16 . The system of claim 15 , wherein the programmable motion device comprises:
a processor for receiving instructions; and an articulated arm supporting the material removal device proximate to the conformal layer of the functional material, the articulated arm following the instructions received by the processor.
17 . The system of claim 15 , wherein the programmable motion device comprises:
a processor for receiving instructions; and an articulated stage supporting the conformal layer of the functional material proximate to the material removal device, the articulated arm following the instructions received by the processor.
18 . The system of claim 13 , wherein the material removal device comprises a laser.
19 . The system of claim 13 , wherein the material removal device is one of a water jet, a mechanical milling machine, and an electric discharge machine.
20 . The method of claim 13 , wherein the functional material is functional as deposited.Join the waitlist — get patent alerts
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